Related papers: Comb-drive MEMS Oscillators for Low Temperature Ex…
We demonstrate the integration of micro-electro-mechanical-systems (MEMS) scanning mirrors as active elements for the local optical pumping of ultra-cold atoms in a magneto-optical trap. A pair of MEMS mirrors steer a focused resonant beam…
We designed and successfully fabricated an absorption-type of superconducting coplanar waveguide (CPW) resonators. The resonators are made from a Niobium film (about 160 nm thick) on a high-resistance Si substrate, and each resonator is…
Over the past few years, significant growth has been observed in using MEMS based passive components in the RF microelectronics domain, especially in transceiver components. This is due to some excellent properties of the MEMS devices like…
We report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated…
We present a design for a tunneling-current-assisted scanning near-field microwave microscope. For stable operation at cryogenic temperatures, making a small and rigid microwave probe is important. Our coaxial resonator probe has a length…
Cooled, low-loss nanomechanical resonators offer the prospect of directly observing the quantum dynamics of mesoscopic systems. However, the present state of the art requires cooling down to the milliKelvin regime in order to observe…
This paper demonstrates a cryogenic deformable mirror (DM) with 1,020 actuators based on micro-electrical mechanical systems (MEMS) technology. Cryogenic space-borne infrared telescopes can experience a wavefront error due to a figure error…
We report on the development of some process capabilities for a polymer-based, multi-layer microelectrofluidic platform, namely: the hot embossing process, metallization on polymer and polymer bonding. Hot embossing experiments were…
Nanoelectromechanical systems (NEMS) are devices integrating electrical and mechanical functionality on the nanoscale. Because of individual electron tunneling, such systems can show rich self-induced, highly non-linear dynamics. We show…
The analogy between mechanical and electromagnetic resonators has been a celebrated paradigm of science and engineering. Exploration of this analogy in recent years has resulted in several exciting research directions, including cavity…
Incorporating functional molecules into sensor devices is an emerging field in molecular electronics that aims at exploiting the sensitivity of different molecules to their environment and turning it into an electrical signal. Among the…
The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures.…
Microelectromechanical systems (MEMS) are currently supporting ground-breaking basic research in materials science and metallurgy as they allow in situ experiments on materials at the nanoscale within electron-microscopes in a wide variety…
This article presents a comprehensive study and design methodology of co-integrated oscillators for nano mass sensing application based on resonant Nano-Electro-Mechanical-System (NEMS). In particular, it reports the capacitive with the…
Recent advances in the fabrication of microelectromechanical systems (MEMS) and their evolution into nanoelectromechanical systems (NEMS) have allowed researchers to measure extremely small forces, masses, and displacements. In particular,…
We have cooled the motion of a radio-frequency nanomechanical resonator by parametric coupling to a driven microwave frequency superconducting resonator. Starting from a thermal occupation of 480 quanta, we have observed occupation factors…
Levitated nanoparticles and microparticles are excellent candidates for the realization of extremely isolated mechanical systems, with a huge potential impact in sensing applications and in quantum physics. Magnetic levitation based on…
Nanomechanical resonators have emerged as sensors with exceptional sensitivities. These sensing capabilities open new possibilities in the studies of the thermodynamic properties in condensed matter. Here, we use mechanical sensing as a…
The ability to confine photons into structures with highly sub-wavelength volumes is extremely interesting for many applications such as sensing, nonlinear optics, and strong light-matter interactions. However, their realization is…
The open electron resonator, described by Duncan et.al, is a mesoscopic device that has attracted considerable attention due to its remarkable behaviour (conductance oscillations), which has been explained by detailed theories based on the…