Related papers: Comb-drive MEMS Oscillators for Low Temperature Ex…
The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electro-mechanical systems (MEMS…
Coupled electromechanical resonators that can be independently driven/detected and easily integrated with external circuits are essential for exploring mechanical modes based signal processing. Here, we present a room temperature…
Superconducting quantum computers have emerged as a leading platform for next-generation computing, offering exceptional scalability and unprecedented computational speeds. However, scaling these systems to millions of qubits for practical…
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is compatible with most of MEMS resonators and Resonant…
Here, we demonstrate the fabrication of single-layer MoS2 mechanical resonators. The fabricated resonators have fundamental resonance frequencies in the order of 10 MHz to 30 MHz (depending on their geometry) and their quality factor is…
We present the coupled oscillator: a new mechanism for signal amplification with widespread application in metrology. We introduce the mechanical theory of this framework, and support it by way of simulations. We present a particular…
This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piezoelectric devices, we include both acoustic and…
The dynamic behavior of a capacitive micro-electro-mechanical (MEMS) accelerometer is evaluated by using a theoretical approach which makes use of a squeeze film damping (SFD) model and ideal gas approach. The study investigates the…
Local well-posedness for a nonlinear parabolic-hyperbolic coupled system modelling Micro-Electro-Mechanical System (MEMS) is studied. The particular device considered is a simple capacitor with two closely separated plates, one of which has…
Cooling microwave resonators to near the quantum ground state, crucial for their operation in the quantum regime, is typically achieved by direct device refrigeration to a few tens of millikelvin. However, in quantum experiments that…
A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its…
We propose an energy-based framework to analyze the statics and dynamics of a ferroelectric negative capacitance-hybrid Microelectromechanical System (MEMS) actuator. A mapping function that relates the charge on the ferroelectric to…
Standard optomechanical sensors operating in the low-temperature regime often face fundamental precision limits imposed by vacuum fluctuations. Here, we demonstrate that moving beyond conventional radiation-pressure interactions and…
This work investigates the behavior of an AlGaAs/GaAs piezoelectric nonlinear MEMS oscillator exhibiting a 1:3 internal resonance. The device is explored in an open-loop configuration, i.e. as a driven resonator, where depending on the…
A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low…
We fabricate a microscale electromechanical system, in which a suspended superconducting membrane, treated as a mechanical oscillator, capacitively couples to a superconducting microwave resonator. As the microwave driving power increases,…
Magnetically levitated spinning rotors are key elements in important technologies such as navigation by gyroscopes, energy storage by flywheels, ultra-high vacuum generation by turbomolecular pumps, and pressure sensing for process control.…
As the variation of temperature alters the intrinsic carrier density in a semiconductor, numerical simulations indicate that the consequent variation of the relative permittivity in the terahertz regime provides a way to realize thermally…
We present a superconducting microresonator thermometer based on two-level systems (TLS) that is drop-in compatible with cryogenic microwave systems. The operational temperature range is 50-1000~mK (which may be extended to 5~mK), and the…