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Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…
Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate knowledge on the mechanical behaviors of thin film…
We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with…
We investigate the dynamics of a microelectromechanical (MEMS) self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional…
Microelectromechanical systems (MEMS) gyroscopes are widely used, e.g. in modern automotive and consumer applications, and require signal stability and accuracy in rather harsh environmental conditions. In many use cases, device reliability…
Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical…
We present a case for developing a millikelvin-temperature transmission electron microscope (TEM). We start by reviewing known reasons for such development, then present new possibilities that have been opened up by recent progress in…
The sensitivity of a low-noise superconducting transition edge sensor (TES) is determined by the thermal conductance of the support structure that connects the active elements of the device to the heat bath. Low-noise devices require…
Active microelectromechanical systems can couple the nanomechanical domain with the electronic domain by integrating electronic sensing and actuation mechanisms into the micromechanical device. This enables very fast and sensitive…
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale, thus opening fascinating perspectives for next generation ultracompact optical devices and systems. However,…
We present a micro-electromechanical system (MEMS) based method for the resist free patterning of nano-structures. Using a focused ion beam (FIB) to customize larger MEMS machines, we fabricate apertures as small as 50 nm on plates that can…
Scanning electron microscopy (SEM) of nanoscale objects in their native conditions and at different temperatures are of critical importance in revealing details of their interactions with ambient environments. Currently available…
Correlating structure with electronic functionality is central to the engineering of quantum materials and devices whose properties depend sensitively on disorder. Transmission electron microscopy (TEM) offers high spatial resolution…
We report on experiments performed in vacuum and at cryogenic temperatures on a tri-port nano-electro-mechanical (NEMS) device. One port is a very non-linear capacitive actuation, while the two others implement the magnetomotive scheme with…
Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando…
Most mechanical resonators are treated as simple linear oscillators. Nonlinearity in the resonance behavior of nanoelectromechanical systems (NEMS) has only lately attracted significant interest. Most recently, cubic-order nonlinearity has…
Gradient acoustic metasurfaces have shown strong potential for manipulation of acoustic waves across the audible and ultrasonic frequency ranges. The key challenge in designing acoustic metasurfaces is to create a series of sub-wavelength…
We have developed a calibration system based on a micro-electromechanical systems (MEMS) mirror that is capable of delivering an optical beam over a wavelength range of 180 -- 2000 nm (0.62 -- 6.89 eV) in a sub-Kelvin environment. This…