Related papers: Comb-drive MEMS Oscillators for Low Temperature Ex…
We report on nanomechanical resonators with very high-quality factors operated as mechanical probes in liquid helium \(^4\mathrm{He}\), with special attention to the superfluid regime down to millikelvin temperatures. Such resonators have…
Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate…
An extremely sensitive temperature measurement MEMS device is developed based on the principle of structural deflection in a bi-material cantilever caused by a difference in thermal expansion coefficients. A dual-beam asymmetrical geometry…
Resonant metasurfaces are devices composed of nanostructured sub-wavelength scatterers that generate narrow optical resonances, enabling applications in filtering, nonlinear optics, and molecular fingerprinting. It is highly desirable for…
In-situ transmission electron microscopy (TEM) has become an important technique to study dynamic processes at highest spatial resolution and one branch is the investigation of phenomena related with electrical currents. Here, we present…
Preparing mechanical systems in their lowest possible entropy state, the quantum ground state, starting from a room temperature environment is a key challenge in quantum optomechanics. This would not only enable creating quantum states of…
The mechanical resonance properties of a micro-electro-mechanical oscillator with a gap of 1.25 $\mu$m was studied in superfluid $^3$He-B at various pressures. The oscillator was driven in the linear damping regime where the damping…
Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Due to its high frequency and large angle,…
The European Research Council has recently funded HOLMES, a project with the aim of performing a calorimetric measurement of the electron neutrino mass measuring the energy released in the electron capture decay of 163Ho. The baseline for…
Micro-electro mechanical systems (MEMS) thermal flow sensors are increasingly used for compact, low-power flow monitoring in biomedical applications. However, silicon-based method for sensor fabrication is limited by high cost, rigidity,…
This paper discusses a logical operation of multi-memories that consist of coupled nonlinear micro-electro-mechanical systems (MEMS) resonators. A MEMS resonator shows two coexisting stable states when nonlinear responses appear. Previous…
Nanomechanical resonators with increasingly high quality factors are enabled following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS). Consequently, efficient, non-dissipative transduction…
We have designed and fabricated superconducting coplanar waveguide resonators with fundamental frequencies from 2 to $9 \rm{GHz}$ and loaded quality factors ranging from a few hundreds to a several hundred thousands reached at temperatures…
Microwave superconducting resonators are extensively studied in fields such as quantum computing and electron spin resonance (ESR) spectroscopy. However, the integration of superconducting resonators with feedback mechanisms to create…
Particle-exchange machines utilize electronic transport to continuously transfer heat between fermionic reservoirs. Here, we couple a quantum mechanical resonator to a particle-exchange machine hosted in a quantum dot and let the system run…
We report in this paper the design, fabrication and experimental characterization of a piezoelectric MEMS microgenerator. This device scavenges the energy of ambient mechanical vibrations characterized by frequencies in the range of 1 kHz.…
We report on low temperature measurements performed on micro-electro-mechanical systems (MEMS) driven deeply into the non-linear regime. The materials are kept in their elastic domain, while the observed non-linearity is purely of…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
: It goes without saying that at present MEMS Technology became one of the latest and emerging methods because of its miniaturization and effective cost. Now near the beginning recognition of disease became a major challenge in front of…
Major challenges of micro thermal machines are the thermal insulation and mechanical tolerance in the case of sliding piston. Switching from piston to membrane in microengines can alleviate the latest and lead to planar architectures.…