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We demonstrate photon counting at 1550 nm wavelength using microwave kinetic inductance detectors (MKIDs) made from TiN/Ti/TiN trilayer films with superconducting transition temperature Tc ~ 1.4 K. The detectors have a lumped-element design…

Instrumentation and Detectors · Physics 2017-06-07 W. Guo , X. Liu , Y. Wang , Q. Wei , L. F. Wei , J. Hubmayr , J. Fowler , J. Ullom , L. Vale , M. R. Vissers , J. Gao

We demonstrate photon-noise limited performance at sub-millimeter wavelengths in feedhorn-coupled, microwave kinetic inductance detectors (MKIDs) made of a TiN/Ti/TiN trilayer superconducting film, tuned to have a transition temperature of…

One of the primary objectives of modern astronomy is the atmospheric characterization of Earth-like exoplanets at visible and infrared wavelengths. Achieving this goal requires extremely sensitive detectors capable of measuring faint signal…

Instrumentation and Methods for Astrophysics · Physics 2026-02-27 Wilbert G. Ras-Vinke , Kevin Kouwenhoven , Jochem J. A. Baselmans , Kenichi Karatsu , David J. Thoen , Vignesh Murugesan , Pieter J. de Visser

We report on the charge carrier dynamics of superconducting titanium nitride (TiN) in the frequency range 90 - 510 GHz (3 - 17 cm-1). The experiments were perfomed on a 18 nm thick TiN film with a critical temperature of 3.4 K. Measurements…

If driven sufficiently strongly, superconducting microresonators exhibit nonlinear behavior including response bifurcation. This behavior can arise from a variety of physical mechanisms including heating effects, grain boundaries or weak…

Superconductivity · Physics 2013-05-21 L. J. Swenson , P. K. Day , B. H. Eom , H. G. Leduc , N. Llombart , C. M. McKenney , O. Noroozian , J. Zmuidzinas

Microwave Kinetic Inductance detectors (MKIDs) have been recognized as a powerful new tool for single photon detection. These highly multiplexed superconducting devices give timing and energy measurement for every detected photon. However,…

Instrumentation and Detectors · Physics 2020-04-10 Israel Hernandez , Gustavo Cancelo , Juan Estrada , Humberto Gonzalez , Andrew Lathrop , Martin Makler , Chris Stoughto

We report on the detection of single photons with {\lambda} = 8 {\mu}m using a superconducting hot-electron microbolometer. The sensing element is a titanium transition-edge sensor with a volume ~ 0.1 {\mu}m^3 fabricated on a silicon…

Following optical pulses ($\lambda=405~\text{nm}$) on titanium nitride (TiN) Microwave Kinetic Inductance Detectors (MKIDs) cooled down at temperatures $T \le T_c / 20$ ($T_c \simeq 4.6~\text{K}$), we observe a large phase-response…

Instrumentation and Methods for Astrophysics · Physics 2021-12-08 Jie Hu , Faouzi Boussaha , Jean-Marc Martin , Paul Nicaise , Christine Chaumont , Samir Beldi , Michel Piat , Piercarlo Bonifacio

We report measurements characterizing the performance of a kinetic inductance detector array designed for a wavelength of 25 microns and very low optical background level suitable for applications such as a far-infrared instrument on a…

We report a novel method of growing strongly-disordered superconducting titanium nitride (TiN) thin films by reactive electron-beam deposition. The normal state sheet resistance and superconducting critical temperature (Tc) can be tuned by…

Superconductivity · Physics 2022-01-05 Raymond Mencia , Yen-Hsiang Lin , Vladimir Manucharyan

Superconducting thin films with high intrinsic kinetic inductance are of great importance for photon detectors, achieving strong coupling in hybrid systems, and protected qubits. We report on the performance of titanium nitride resonators,…

Mesoscale and Nanoscale Physics · Physics 2018-12-05 A. Shearrow , G. Koolstra , S. J. Whiteley , N. Earnest , P. S. Barry , F. J. Heremans , D. D. Awschalom , E. Shirokoff , D. I. Schuster

We deposit thin titanium-nitride (TiN) and TiN/Ti/TiN multilayer films on sapphire substrates and measure the reflectance and transmittance in the wavelength range from 400 nm to 2000 nm using a spectrophotometer. The optical constants…

Optics · Physics 2019-01-30 M. Dai , W. Guo , X. Liu , M. Zhang , Y. Wang , L. F. Wei , G. C. Hilton , J. Hubmayr , J. Ullom , J. Gao , M. R. Vissers

We have grown superconducting TiN films by atomic layer deposition with thicknesses ranging from 6 to 89 nm. This deposition method allows us to tune the resistivity and critical temperature by controlling the film thickness. The microwave…

We describe the fabrication of homogeneous sub-stoichiometric titanium nitride films for microwave kinetic inductance detector (mKID) arrays. Using a 6 inch sputtering target and a homogeneous nitrogen inlet, the variation of the critical…

Instrumentation and Detectors · Physics 2016-02-17 G. Coiffard , K-F. Schuster , E. F. C. Driessen , S. Pignard , M. Calvo , A. Catalano , J. Goupy , A. Monfardini

We investigate electron transport and phase-breaking processes in thin titanium nitride (TiN) films of epitaxial quality. Previous studies show that a minute surface magnetic disorder significantly reduces the critical temperature…

Photon number resolving detectors play a central role in quantum optics. A key challenge in resolving the number of absorbed photons in the microwave frequency range is finding a suitable material that provides not only an appropriate band…

Mesoscale and Nanoscale Physics · Physics 2021-04-20 Eric Chatterjee , Wei Pan , Daniel Soh

Superconducting nanowire single-photon detectors (SNSPDs) are the highest performing photon-counting technology in the near-infrared (NIR). Due to delay-line effects, large area SNSPDs typically trade-off timing resolution and detection…

Superconducting thin films with high intrinsic kinetic inductance $L_{k}$ are important for high-sensitivity detectors, enabling strong coupling in hybrid quantum systems, and enhancing nonlinearities in quantum devices. We report the…

Titanium nitride (TiNx) films are ideal for use in superconducting microresonator detectors because: a) the critical temperature varies with composition (0 < Tc < 5 K); b) the normal-state resistivity is large, \rho_n ~ 100 $\mu$Ohm cm,…

Thin films of disordered superconductors such as titanium nitride (TiN) exhibit large kinetic inductance (KI), high critical temperature, and large quality factors at the single-photon level. KI nonlinearity can be exploited as an…

Quantum Physics · Physics 2022-08-02 Chaitali Joshi , Wenyuan Chen , Henry G. LeDuc , Peter K. Day , Mohammad Mirhosseini
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