Related papers: Short Communication: Stable DRIE-patterned SiO2/Si…

This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret-based Vibration Energy Harvesters (e-VEH). This process…

Emerging 3D chips stacking and MEMS/Sensors packaging technologies are using DRIE (Deep Reactive Ion Etching) to etch through-silicon via (TSV) for advanced interconnections. The interconnection step can be done prior to or post CMOS…

Deep reactive ion etching (DRIE) with the Bosch process is one of the key procedures used to manufacture micron-sized structures for MEMS and microfluidic applications in silicon and, hence, of increasing importance for miniaturization in…

This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe…

In view of the integration of membrane resonators with more complex MEMS structures, we developed a general fabrication procedure for circular shape SiN$_x$ membranes using Deep Reactive Ion Etching (DRIE). Large area and high-stress…

Thanks to miniaturisation, it is today possible to imagine self-powered systems that use vibrations to produce their own electrical energy. Many energy-harvesting systems already exist. Some of them are based on the use of electrets:…

In search of the potential cathode materials for sodium-ion batteries and to understand the diffusion kinetics, we report the detailed analysis of electrochemical investigation of honeycomb structured Na$_{2}$Ni$_{2}$TeO$_{6}$ material…

In this work, a single crystal CVD diamond film with a novel three-dimensional (3D) interdigitated electrode geometry has been fabricated with the Reactive Ion Etching (RIE) technique in order to increase the charge collection efficiency…

Deep reactive ion etching (DRIE) of borosilicate glass and profile control of an etched groove are reported. DRIE was carried out using an anodically bonded silicon wafer as an etching mask. We controlled the groove profile, namely…

Dynamic operating envelopes (DOEs) offer an attractive solution for maintaining network integrity amidst increasing penetration of distributed energy resources (DERs) in low-voltage (LV) networks. Currently, the focus of DOEs primarily…

Extreme Ultraviolet (EUV) lithography is the newest technology that will be used in the semiconductor industry for printing circuitry in the sub-20 nm scale. Low-energy electrons (LEEs) produced upon illumination of resist materials with…

In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-Plane Overlap Plate (IPOP) configuration [1]. Measurements…

Li$_{7-4x}$Ge$_x$La$_3$Zr$_2$O$_{12}$ has been synthesized using the conventional solid-state reaction method by substituting Germanium (Ge) at the Li site, which increases the Li-ion vacancies and leads to an increase in conductivity with…

We report the electrochemical sodium-ion kiinetics and distribution of relaxation time (DRT) analysis of a newly designed mixed polyanionic NaFe$_{1.6}$V$_{0.4}$(PO$_{4}$)(SO$_{4}$)$_{2}$@CNT composite as a cathode. The specific capacity of…

We report on the development of the HEC2 (High Energy Compression and Current) charge breeder, a possible high performance successor to REXEBIS at ISOLDE. The new breeder would match the performance of the HIE-ISOLDE linac upgrade and make…

Solid electrolyte interphase (SEI), a thin layer that dynamically forms between active electrode and electrolyte during battery operation, critically governs the performance of rechargeable batteries1-5. An ideal SEI is expected to be…

The current work employs a phase-field model to test the stability of nanoscale periodic domain patterns, and to explore the application of one pattern in an energy harvester device. At first, the stability of several periodic domain…

The correct assessment of battery states is essential to maximize battery pack performances while ensuring reliable and safe operation. This work introduces EIS2MOD, a novel modelling framework for Li-ion cells based on Distribution of…

Dijet cross sections in neutral current deep inelastic ep scattering have been measured in the range $10 < \Q2 < 10^4$ GeV$^2$ with the ZEUS detector at HERA using an integrated luminosity of 38.4 pb$^{-1}$. The cross sections, measured in…

Energy harvesting (EH) IoT devices that operate intermittently without batteries, coupled with advances in deep neural networks (DNNs), have opened up new opportunities for enabling sustainable smart applications. Nevertheless, implementing…