Related papers: Near-field scanning microwave microscope for inter…
We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-\mu m-thick blanket low-k interconnect films on up to 300 mm in diameter wafers. The method has about 10 micron sampling spot size,…
We have demonstrated a technique capable of in-line measurement of dielectric constant of low-k interconnect films on patterned wafers utilizing a test key of ~50x50 \mu m in size. The test key consists of a low-k film backed by a Cu grid…
We have developed a near-field scanned microwave probe with a sampling volume of approximately 10 micron in diameter, which is the smallest one achieved in near-field microwave microscopy. This volume is defined to confine close to 100…
We describe the use of a near-field scanning microwave microscope to image the permittivity and tunability of bulk and thin film dielectric samples on a length scale of about 1 micron. The microscope is sensitive to the linear permittivity,…
We report a new technique of scanning capacitance microscopy at microwave frequencies. A near field scanning microwave microscope probe is kept at a constant height of about 1nm above the samplewith the help of Scanning Tunneling Microscope…
A stripline-type near-field microwave probe is microfabricated for microwave impedance microscopy. Unlike the poorly shielded coplanar probe that senses the sample tens of microns away, the stripline structure removes the stray fields from…
We present a detailed modeling and characterization of our scalable microwave nanoprobe, which is a micro-fabricated cantilever-based scanning microwave probe with separated excitation and sensing electrodes. Using finite-element analysis,…
We outline calibrated measurements of the microwave reflection coefficient from the tunnel junction of an ultra-high vacuum low temperature scanning tunneling microscope. The microwave circuit design is described in detail, including an…
We briefly review some non-accelerator high-frequency applications of superconductors. These include the use of high-Tc superconductors in front-end band-pass filters in cellular telephone base stations, the High Temperature Superconductor…
We have developed scanning near-field microwave microscopes which can image electrodynamic properties of superconducting materials on length scales down to about 2 $\mu$m. The microscopes are capable of quantitative imaging of sheet…
We describe the near-field microwave microscopy of microwave devices on a length scale much smaller than the wavelength used for imaging. Our microscope can be operated in two possible configurations, allowing a quantitative study of either…
By scanning a fine open-ended coaxial probe above an operating microwave device, we image local electric fields generated by the device at microwave frequencies. The probe is sensitive to the electric flux normal to the face of its center…
Microwave impedance microscopy (MIM) is a near-field imaging technique that has been used to visualize the local conductivity of materials with nanoscale resolution across the GHz regime. In recent years, MIM has shown great promise for the…
In this paper, we propose a non-invasive imaging method of microwave near field using a diamond containing nitrogen-vacancy centers. We applied synchronous pulsed sequence combined with charge coupled device camera to measure the amplitude…
We report quantitative measurements of nanoscale permittivity and conductivity using tuning-fork (TF) based microwave impedance microscopy (MIM). The system is operated under the driving amplitude modulation mode, which ensures satisfactory…
We report on the design and performance of a cryogenic (300 mK) near-field scanning microwave microscope. It uses a microwave resonator as the near-field sensor, operating at a frequency of 6 GHz and microwave probing amplitudes down to 100…
Electronic transport in semiconducting single-wall carbon nanotubes is studied by combined scanning gate microscopy and scanning impedance microscopy (SIM). Depending on the probe potential, SIM can be performed in both invasive and…
We have measured the frequency-dependent, complex impedance of thin metal strips in a broad range of microwave frequencies (45~MHz to 20~GHz). The spectra are in good agreement with theoretical predictions of an RCL model. The resistance,…
Molecular and atomic imaging required the development of electron and scanning probe microscopies to surpass the physical limits dictated by diffraction. Nano-infrared experiments and pico-cavity tip-enhanced Raman spectroscopy imaging…
Inductance of superconducting thin-film inductors and structures with linewidth down to 250 nm has been experimentally evaluated. The inductors include various striplines and microstrips, their 90-degree bends and meanders, interlayer vias,…