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Tantalum and aluminum on sapphire are widely used platforms for qubits of long coherent time. As quantum chips scale up, the number of Josephson junctions on Sapphire increases. Thus, both the uniformity and stability of the junctions are…

Superconductivity · Physics 2024-05-08 Yuzhen Zheng , Shuming Li , Zengqian Ding , Kanglin Xiong , Jiagui Feng , Hui Yang

We have developed a combined photolithography and electron-beam lithography fabrication process for sub-\mum to \mum-size Nb/Al-AlOx/Nb Josephson junctions. In order to define the junction size and protect its top electrode during anodic…

Superconductivity · Physics 2011-02-14 Christoph Kaiser , J. M. Meckbach , K. Ilin , J. Lisenfeld , R. Schäfer , A. V. Ustinov , M. Siegel

We have developed a novel fabrication process for ultra-small, full-epitaxial NbN Josephson junctions on a silicon (Si) substrate. A full-epitaxial NbN/AlN/NbN tri-layer was grown on a Si (100) wafer with a (200)-oriented TiN buffer layer.…

Superconductivity · Physics 2020-12-02 Wei Qiu , Hirotaka Terai

A minimal method to fabricate Al/AlO$_x$/Al Josephson junctions (JJs) using photolithography and argon etching, before metallization and oxidation, is demonstrated. JJs with areas ranging from 1 to 6 $\mu$m$^2$ can be fabricated and, with…

Quantum Physics · Physics 2026-04-30 Imran Mahboob , Satoshi Sasaki , Takaaki Takenaka

We have realized submicron tunnel ferromagnetic Al/AlO$_x$/Al/Ni$_{80}$Fe$_{20}$/Al Josephson junctions (JJs) in Manhattan-style configuration for qubit applications. These junctions have been designed to lie within the energy range of…

Superconductivity · Physics 2026-01-15 R. Satariano , R. Ferraiuolo , F. Calloni , H. G. Ahmad , D. Gatta , F. Tafuri , A. Bruno , D. Massarotti

Sandwich-type MgB2 Josephson tunnel junctions (MgB2/AlOx/MgB2) have been fabricated using as-grown MgB2 films formed by molecular beam epitaxy. The junctions exhibited substantial supercurrent and a well-defined superconducting gap…

Superconductivity · Physics 2007-05-23 K. Ueda , S. Saito , K. Semba , T. Makimoto , M. Naito

Josephson junctions form the core circuit element in superconducting quantum computing circuits, single flux quantum digital logic circuits, and sensing devices such as SQUIDs. Aluminum oxide has typically been used as the tunnel barrier.…

Fabrication of sub-micron Josephson junctions is demonstrated using standard processing techniques for high-coherence, superconducting qubits. These junctions are made in two separate lithography steps with normal-angle evaporation. Most…

Superconductivity · Physics 2017-08-02 X. Wu , J. L. Long , H. S. Ku , R. E. Lake , M. Bal , D. P. Pappas

We present experimental studies of high quality underdamped 0, pi, and 0-pi ferromagnetic Josephson tunnel junctions of intermediate length L (lambda_J < L < 5 lambda_J, where lambda_J is the Josephson penetration depth). The junctions are…

Josephson tunnel junctions are the centerpiece of almost any superconducting electronic circuit, including qubits. Typically, the junctions for qubits are fabricated using shadow evaporation techniques to reduce dielectric loss…

In this article, we present results of our recent work of epitaxially-grown aluminum (epi-Al) on antimonide heterostructures, where the epi-Al thin film is grown at either room temperature or below zero $^o$C. A sharp superconducting…

We have developed a technique to fabricate sub-micron, 0.6 um x 0.6 um Al-AlOx-Nb tunnel junctions using a standard e-beam resist, angle evaporation and double oxidation of the tunneling barrier, resulting in high quality niobium, as…

Mesoscale and Nanoscale Physics · Physics 2017-08-23 Juhani Julin , Ilari Maasilta

Sandwich-type all-MgB2 Josephson tunnel junctions (MgB2/AlOx/MgB2) have been fabricated for the first time with as-grown MgB2 films formed by molecular beam epitaxy. The junctions exhibit substantial superconducting current (IcRN product ~…

Superconductivity · Physics 2009-11-10 K. Ueda , S. Saito , K. Semba , T. Makimoto , M. Naito

We study the electrical transport of vertically-stacked Josephson tunnel junctions using GdBa$_2$Cu$_3$O$_{7-d}$ electrodes and a BaTiO$_3$ barrier with thicknesses between 1 nm and 3 nm. The junctions with an area of 20 mm x 20 mm were…

Superconductivity · Physics 2020-09-23 H. Navarro , M. Sirena , Jeehoon Kim , N. Haberkorn

Self-shunted aluminum Josephson junctions with high-transparency barriers were fabricated using the shadow-evaporation technique and measured at low temperatures, T=25 mK. Due to high junction transparency, the IV-characteristics were found…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 S. V. Lotkhov , E. M. Tolkacheva , D. V. Balashov , M. I. Khabipov , F. -I. Buchholz , A. B. Zorin

Superconducting qubits based on Al/AlOx/Al Josephson junction are one of the most promising candidates for the physical implementation of universal quantum computers. Due to scalability and compatibility with the state-of-the-art…

We fabricated high quality $\Nb/\Al_2\O_3/\Ni_{0.6}\Cu_{0.4}/\Nb$ superconductor-insulator-ferromagnet-superconductor Josephson tunnel junctions. Depending on the thickness of the ferromagnetic $\Ni_{0.6}\Cu_{0.4}$ layer and on the ambient…

Superconductivity · Physics 2007-05-23 M. Weides , M. Kemmler , H. Kohlstedt , A. Buzdin , E. Goldobin , D. Koelle , R. Kleiner

We investigate tunnel ferromagnetic Josephson junctions based on Superconductor-Insulator-thin superconductor-Ferromagnet-Superconductor multilayers. A comparative study of their electrodynamic properties is performed for junctions with…

Due to their unique properties as lossless, nonlinear circuit elements, Josephson junctions lie at the heart of superconducting quantum information processing. Previously, we demonstrated a two-layer, submicrometer-scale overlap junction…

Semiconductor-based Josephson junctions provide a platform for studying proximity effect due to the possibility of tuning junction properties by gate voltage and large-scale fabrication of complex Josephson circuits. Recently Josephson…

Mesoscale and Nanoscale Physics · Physics 2019-03-27 William Mayer , Joseph Yuan , Kaushini Wickramasinghe , Tri Nguyen , Matthieu C. Dartiailh , Javad Shabani
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