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This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding anti-stiction…

Other Computer Science · Computer Science 2008-12-18 Salim Touati , Nicolas Lorphelin , Alexandre Kanciurzewski , Renaud Robin , A. -S. Rollier , Olivier Millet , Karim Segueni

The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro…

Other Computer Science · Computer Science 2008-12-18 C. -Y. Lee , Zgen-Hui Chen , Hsien-Tseng Chang , Chiang-Ho Cheng , Chih-Yung Wen

Electrostatic actuators are simple but important switching devices for MEMS applications. Due to the difficulties associated with the electrostatic nonlinearity, precise mathematical description is often hard to obtain for the dynamics of…

Dynamical Systems · Mathematics 2012-01-27 Yisong Yang , Ruifeng Zhang , Le Zhao

We present a two-dimensional electron heterostructure field effect device of simplistic design and ease of fabrication that displays high mobility electron transport. This is accomplished using a high efficacy contacting scheme and simple…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 R. L. Willett , L. N. Pfeiffer , K. W. West

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

Other Computer Science · Computer Science 2007-11-29 V. Rochus , J. -C. Golinval , C. Louis , C. Mendez , I. Klapka

To investigate the effect and ability of FACTS devices using the Fast and Flexible Holomorphic Embedding technique (FFHE), it is necessary to develop an embedded system for these devices. Therefore, this paper presents FFHE based embedded…

Systems and Control · Electrical Eng. & Systems 2021-01-29 Pradeep Singh , Nilanjan Senroy

Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…

Computational Physics · Physics 2007-05-23 N. Majumdar , S. Mukhopadhyay

In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched…

Other Computer Science · Computer Science 2008-12-18 F. Maury , A. Pothier , A. Crunteanu , F. Conseil , P. Blondy

Recent advances in holography, wireless sensing and light fidelity technologies have resulted in the need for antennas that can support highly efficient beam directivity for a broad angular range. Transmitarrays have been shown to be…

Optics · Physics 2017-11-07 Nikolaos Vasilantonakis , Jacob Scheuer , Amir Boag

We report on a modified transfer technique for atomically thin materials integrated onto microelectromechanical systems (MEMS) for studying strain physics and creating strain-based devices. Our method tolerates the non-planar structures and…

This paper reports the first demonstration of a magnet-free, high performance microelectromechanical system (MEMS) based circulator. An innovative circuit based on the commutation of MEMS resonators with high quality (Q) factor using RF…

We report on fabrication of novel field-effect transistors (FETs) based on transition metal dichalcogenides. The unique structure of single crystals of these layered inorganic semiconductors enables fabrication of FETs with intrinsically…

Materials Science · Physics 2009-11-10 V. Podzorov , M. E. Gershenson , Ch. Kloc , R. Zeis , E. Bucher

We demonstrate tunable solid state and flexible graphene field effect devices (FEDs) fabricated using a poly(methylmethacrylate) (PMMA) and lithium fluoride (LiF) composite dielectric. Increasing the concentration of LiF in the composite…

Mesoscale and Nanoscale Physics · Physics 2016-05-03 Arunandan Kumar , Priyanka Tyagi , Ritu Srivastava

The dynamics of a free boundary problem for electrostatically actuated microelectromechanical systems (MEMS) is investigated. The model couples the electric potential to the deformation of the membrane, the deflection of the membrane being…

Analysis of PDEs · Mathematics 2013-02-26 Joachim Escher , Philippe Laurencot , Christoph Walker

This dissertation presents a new coupled electro-mechanical model that is an improvement on the classical parallel-plate approximation. The model employs a hyperbolic function to account for the beam deformed shape and electrostatic field.…

Applied Physics · Physics 2017-08-24 Xi Luo

Wearable electronic devices and gadgets raise the need for flexible, thin and lightweight batteries. In this article we present for the first time, a unique, single-step method for the preparation of a membrane-electrode assembly for…

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

Instrumentation and Detectors · Physics 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

We demonstrate here a proof-of-concept experiment that microelectromechanical systems (MEMS) can be actuated using photoelectrowetting. In order to demonstrate this, a 30 \mu m thick aluminum cantilever is actuated using an ordinary white…

Fluid Dynamics · Physics 2012-06-01 Matthieu Gaudet , Steve Arscott

We study the local well-posedness of the solution to a coupled nonlinear elliptic-parabolic system which models electrical discharge in a Micro-Electro-Mechanical System (MEMS). A simple MEMS capacitor device contains two plates acting as…

Analysis of PDEs · Mathematics 2026-02-26 Heiko Gimperlein , Runan He , Andrew A. Lacey

In this paper we describe a stretchable solid-state electronic switching material that operates at high voltage potentials, as well as a switch material benchmarking technique that utilizes a modular dielectric elastomer (artificial muscle)…

Materials Science · Physics 2016-03-15 Nixon Chau , Geoffrey A. Slipher , Benjamin M. OBrien , Randy A. Mrozek , Iain A. Anderson
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