"Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept
Fluid Dynamics
2012-06-01 v1 Materials Science
Instrumentation and Detectors
Abstract
We demonstrate here a proof-of-concept experiment that microelectromechanical systems (MEMS) can be actuated using photoelectrowetting. In order to demonstrate this, a 30 \mu m thick aluminum cantilever is actuated using an ordinary white light source. A deflection of 56 \mu m is observed using a light irradiance equal to \approx 1000 W m-2 at a bias of 7 V. The deflection of the cantilever relies on the recently observed photoelectrowetting effect [Sci. Rep.1, 184 (2011)]. Such "actuation at a distance" could be useful for optical addressing and control of autonomous wireless sensors, MEMS and microsystems.
Keywords
Cite
@article{arxiv.1201.2873,
title = {"Actuation at a distance" of microelectromechanical systems using photoelectrowetting: proof-of-concept},
author = {Matthieu Gaudet and Steve Arscott},
journal= {arXiv preprint arXiv:1201.2873},
year = {2012}
}