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The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

Other Computer Science · Computer Science 2007-11-29 V. Rochus , J. -C. Golinval , C. Louis , C. Mendez , I. Klapka

Compression experiments are widely used to study the mechanical properties of materials at micro- and nanoscale. However, the conventional engineering stress measurement method used in these experiments neglects to account for the…

Materials Science · Physics 2025-07-24 Jalal Smiri , Oguz Umut Salman , Matteo Ghidelli , Ioan R. Ionescu

We report on low temperature measurements performed on micro-electro-mechanical systems (MEMS) driven deeply into the non-linear regime. The materials are kept in their elastic domain, while the observed non-linearity is purely of…

Mesoscale and Nanoscale Physics · Physics 2015-06-18 Eddy Collin , Yuriy M. Bunkov , Henri Godfrin

A mechanical electroscope based on a change in the resonant frequency of a cantilever one micron in size in the presence of charge has recently been fabricated. We derive the decoherence rate of a charge superposition during measurement…

Condensed Matter · Physics 2009-11-07 R. E. S. Polkinghorne , G. J. Milburn

The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical…

Mesoscale and Nanoscale Physics · Physics 2012-11-05 Rassul B. Karabalin , L. G. Villanueva , M. H. Matheny , John E. Sader , Michael L. Roukes

In Micro-electro-mechanical Systems (MEMS) based pressure sensors and acoustic devices, deflection of a membrane is utilized for pressure or sound measurements. Due to advantages of capacitive pressure sensor over piezoresistive pressure…

Applied Physics · Physics 2019-08-29 Rishabh Bhooshan Mishra , S Santosh Kumar , Ravindra Mukhiya

Plastic deformation of micron-scale crystalline materials differ considerably from bulk ones, because it is characterized by random strain bursts. To obtain a detailed picture about this stochastic phenomenon, micron sized pillars have been…

We present a novel approach to probe elastic properties of polyelectrolyte multilayer microcapsules. The method is based on measurements of the capsule load-deformation curves with the atomic force microscope. The experiment suggests that…

Soft Condensed Matter · Physics 2009-11-10 V. V. Lulevich , D. Andrienko , O. I. Vinogradova

Material deformation and failure under impact loading is a subject of active investigation in space science and often requires very specialized equipment for testing. In this work, we present the design, operational analysis and application…

The bulk behaviour of granular materials is tied to its mesoscale and particle-scale features: strength properties arise from the buildup of various anisotropic structures at the particle-scale induced by grain connectivity (fabric), force…

Soft Condensed Matter · Physics 2024-09-25 Carmen L. Lee , Ephraim Bililign , Emilien Azéma , Karen E. Daniels

We use optical trapping to continuously bend an isolated microtubule while simultaneously measuring the applied force and the resulting filament strain, thus allowing us to determine its elastic properties over a wide range of applied…

Biological Physics · Physics 2018-07-24 Edvin Memet , Feodor Hilitski , Margaret A Morris , Walter J Schwenger , Zvonimir Dogic , L Mahadevan

Motivated by recent experiments showing the buckling of microtubules in cells, we study theoretically the mechanical response of, and force propagation along elastic filaments embedded in a non-linear elastic medium. We find that, although…

Soft Condensed Matter · Physics 2009-11-13 Moumita Das , Alex J. Levine , F. C. MacKintosh

In this study the possibility of combining commercial Scanning Force Microscopes (SFM) with stretching devices for the investigation of microscopic surface changes during stepwise elongation is investigated. Different types of stretching…

Soft Condensed Matter · Physics 2013-12-11 Sabine Hild , Armin Rosa , Othmar Marti

Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the…

Materials Science · Physics 2021-03-10 Omar Tricinci , Marco Carlotti , Andrea Desii , Fabian Meder , Virgilio Mattoli

An original MEMS-based force sensing device is designed which allows to measure spatially resolved normal and tangential stress fields at the base of an elastomeric film. This device is used for the study of the contact stress between a…

Soft Condensed Matter · Physics 2007-11-08 J. Scheibert , A. Prevost , J. Frelat , P. Rey , G. Debrégeas

Sliding motion between two rough solids under light normal loading involves myriad micro-impacts between antagonist micro-asperities. Those micro-impacts are at the origin of many emerging macroscopic phenomena, including the friction…

Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…

Mesoscale and Nanoscale Physics · Physics 2018-06-14 Ulrike Nabholz , Wolfgang Heinzelmann , Jan E. Mehner , Peter Degenfeld-Schonburg

Although stiction is a cumbersome problem for microsystems, it stimulates investigations of surface adhesion. In fact, the shape of an adhered cantilever carries information of the adhesion energy that locks one end to the substrate. We…

Mesoscale and Nanoscale Physics · Physics 2017-07-12 V. B. Svetovoy , A. E. Melenev , M. V. Lokhanin , G. Palasantzas

The Casimir Effect is a physical manifestation of quantum fluctuations of the electromagnetic vacuum. When two metal plates are placed closely together, typically much less than a micron, the long wavelength modes between them are frozen…

Applied Physics · Physics 2018-10-23 Alexander Stange , Matthias Imboden , Josh Javor , Lawrence K. Barrett , David J. Bishop

In this paper, a capacitive flexible tactile sensor was designed to measure the pressure of objects based on MEMS technology. This sensor is a structure of a 4x4 array, with metal Ag as the capacitive electrode, which forms the tactile…

Materials Science · Physics 2021-11-02 Dandan Yuan , Haoxin Shu , Yulong Bao , Bin Xu , Huan Wang