Related papers: Measurement of Large Forces and Deflections in Mic…
MEMS technology has been developed rapidly in the last few years. More and more special micro structures were discussed in several publications. However, all of the structures were produced by consist of the three fundamental structures,…
The accurate determination of the elastic properties is non-trivial for metallic foils. The measured elastic modulus is often described in literature as significantly smaller than the respective modulus of the bulk counterparts. This paper…
The dynamic behavior of a capacitive micro-electro-mechanical (MEMS) accelerometer is evaluated by using a theoretical approach which makes use of a squeeze film damping (SFD) model and ideal gas approach. The study investigates the…
We report on a flow sensing approach based on deflection monitoring of micro beams buckled by the compressive thermal stress due to electrothermal Joules heating. The air stream convectively cooling the device affects both the critical…
The electric forces acting on an atomic force microscope tip in solution have been measured using a microelectrochemical cell formed by two periodically biased electrodes. The forces were measured as a function of lift height and bias…
A microfluidic device is constructed from PDMS with a single channel having a short section that is a thin flexible membrane, in order to investigate the complex fluid-structure interaction that arises between a flowing fluid and a…
This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently…
An adjoint-based procedure to determine weaknesses, or, more generally the material properties of structures is developed and tested. Given a series of force and deformation/strain measurements, the material properties are obtained by…
This paper reports on the systematic electromechanical characterization of a new three-axial force sensor used in dimensional metrology of micro components. The siliconbased sensor system consists of piezoresistive mechanicalstress…
Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures (plates or array of thin beams) with cross-sections of the order of microns and lengths of the order of tens or hundreds of microns. Electrostatic forces play…
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers,…
Measurements of the deflection induced by thermal noise have been performed on a rectangular atomic force microscope cantilever in air. The detection method, based on polarization interferometry, can achieve a resolution of 1E-14 m/rtHz in…
We present mechanical measurements performed at low temperatures on cantilever-based microelectro-mechanicalstructures(MEMS) coated with a metallic layer. Two very different coatings are presented in order to illustrate the capabilities of…
A force measurement technique has been developed that utilizes a clamped fiber optic element both as a cantilever and as a highly sensitive probe of the static and dynamic displacement of a sample that is mounted near its free end. Light…
Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…
The Transient Fluctuation Theorem is used to calibrate an Atomic Force Microscope by measuring the fluctuations of the work performed by a time dependent force applied between a collo{\"i}dal probe and the surface. From this measure one can…
Mechanical properties of the cell are important biomarkers for probing its architectural changes caused by cellular processes and/or pathologies. The development of microfluidic technologies have enabled measuring cell mechanics at…
An electro-mechanical setup for the measurement of AC-forces in a low-temperature tunnelling microscope has been developed, which enables extremely high force resolution. The crosstalk of vibrations onto the tunnelling current is used to…
Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…
The dynamic properties of materials utilized in architecture or engineering applications can significantly affect their performance under dynamic or impact loading conditions. To evaluate such behavior, force transducers are commonly…