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High throughput screening of small molecules and natural products is costly, requiring significant amounts of time, reagents, and operating space. Although microarrays have proven effective in the miniaturization of screening for certain…
Superconducting scanning tunneling microscope tips have been fabricated with a high degree of reproducibility. The fabrication process relies on sequential deposition of superconducting Pb and a proximity-coupled Ag capping layer onto a…
Recent works demonstrated that fiber arrays may constitue the basis of an open digital microfluidics. Various processes, such as droplet motion, fragmentation, trapping, release, mixing and encapsulation, may be achieved on fiber arrays.…
Future far-infrared astrophysics observatories will require focal plane arrays containing thousands of ultra-sensitive, superconducting detectors, each of which needs to be optically coupled to the telescope. At longer wavelengths, many…
We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography…
We report on the fabrication and performance of a new kind of tip for scanning tunneling microscopy. By fully incorporating a metallic tip on a silicon chip using modern micromachining and nanofabrication techniques, we realize so-called…
Vertically aligned silicon micro/nanowire arrays of different sizes have been synthesized by combining the modified metal-assisted chemical etching (MACE) and reactive ion etching (RIE) methods. This is a novel lithography-free method to…
Micro lens array is crucial in various kinds of optical and electronic applications. A micro lens array with high numerical aperture (NA) and low aberration is in particular needed. This research is aimed to design and fabricate such a…
We present a silicon-nitride-based optical phased array with built-in focusing and steering capability, that operates at 522 nm and is aimed at complementing a micro-electrode array for joint electrical and optical probing of retinal…
We describe our work towards the manufacture of micro-optical arrays using freeform diamond machining techniques. Simulations have been done to show the feasibility of manufacturing micro-lens arrays using the slow-tool servo method. Using…
Photonic Integrated Circuits (PICs) are essential for high-speed and compact optoelectronic applications, yet efficient optical coupling to PIC remains a critical challenge, where minimizing insertion losses is crucial for high-performance…
The spatially precise integration of arrays of micro-patterned two-dimensional (2D) crystals onto three-dimensionally structured Si/SiO$_2$ substrates represents an attractive strategy towards the low-cost system-on-chip integration of…
CMOS-based sensor array chips provide new and attractive features as compared to today's standard tools for medical, diagnostic, and biotechnical applications. Examples for molecule- and cell-based approaches and related circuit design…
The recent development of the superlattice nanowire pattern transfer (SNAP) technique allows for the fabrication of arrays of nanowires at a diameter, pitch, aspect ratio, and regularity beyond competing approaches. Here, we report the…
We propose that a photonic array of resonant circular dielectric waveguides with subwavelength grating can be designed as a robust and sensitive topological chemical sensor. The device can detect trace amounts of a given chemical species…
Silicon nanostructuring imparts unique material properties including antireflectivity, antifogging, anti-icing, self-cleaning, and/or antimicrobial activity. To tune these properties however, a good control over features size and shape is…
Dermal interstitial fluid (ISF) is a rich source of biomarkers (e.g., glucose) that can be used for continuous health monitoring with wearable sensors. Hollow microneedle devices are a promising solution to extract ISF on demand by…
The microlens is a key enabling technology in optoelectronics, permitting light to be efficiently coupled to and from devices such as image sensors and light-emitting diodes. Their ubiquitous nature motivates the development of new…
Ultra-thin crystal targets in shape of self-supporting membranes were produced for our experiments with parametric x-rays emitted by low-energy electrons. Concise description of the technology developed for production of silicon crystal…
We present a simple lithographic method for fabrication of microresonator devices at the optical fiber surface. First, we undress the predetermined surface areas of a fiber segment from the polymer coating with a focused CO2 laser beam.…