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A cost effectively method to fabricate nanopores in silicon by only using the conventional wet-etching technique is developed in this research. The main concept of the proposed method is a two-step etching process, including a premier…
Nowadays, microelectronics and nanoelectronics require the search for new materials, including masks for creating structures. Today, the intermediate hard mask strategy is one of the key issues in achieving a good balance between…
Chip-scale optical phased arrays could enable compact beam steering and LIDAR for autonomous vehicles, precision robotics, and free-space optical communications. Because these applications demand wide angle beam steering as well as high…
We fabricate and characterize carbon-fiber tips for their use in combined scanning tunneling and force microscopy based on piezoelectric quartz tuning fork force sensors. An electrochemical fabrication procedure to etch the tips is used to…
Multi-electrode arrays serve to record electrical signals of many neurons in the brain simultaneously. For most of the past century, electrodes that penetrate brain tissue have had exactly one shape: a straight needle. Certainly this was a…
Photonic integrated circuit (PIC) phased arrays can be an enabling technology for a broad range of applications including free-space laser communications on compact moving platforms. However, scaling PIC phased arrays to a large number of…
We fabricated highly adherent and electrically conductive micropatterns on SU-8 by supersonic cluster beam deposition (SCBD). This technique is based on the acceleration of neutral metallic nanoparticles produced in the gas phase. The…
Even though submicron silicon waveguides have been proposed for dense integration of photonic devices, to date the lightwave circuits on the market mainly rely on waveguides with micron-scale core dimensions. These larger waveguides feature…
The adoption of high-density electrode systems for human-machine interfaces in real-life applications has been impeded by practical and technical challenges, including noise interference, motion artifacts and the lack of compact electrode…
Silicon is an excellent material for microelectronics and integrated photonics with untapped potential for mid-IR optics. Despite broad recognition of the importance of the third dimension, current lithography methods do not allow…
We report on fabricating high-fill-factor plano-convex spherical and square micro-lens arrays on fused silica glass surface using CO2 laser assisted reshaping technique. Initially, periodic micro-pillars have been encoded on the glass…
Chemical bioreactions play a significant role in many of the microfluidic devices, and their applications in biomedical science have seen substantial growth. Given that effective mixing is vital for initiating biochemical reactions in many…
This paper presents a simple and effective method to fabricate a polydimethyl-siloxane (PDMS) microlens array with a high fill factor, which utilizes the UV proximity printing and photoresist replication methods. The concave microlens array…
Microtechnology becomes a versatile tool for biological and biomedical applications. Microwells have been established long but remained non-intelligent up to now. Merging new fabrication techniques and handling concepts with…
We fabricate and characterize waveguides composed of closely spaced and longitudinally oriented silicon ridges etched into silicon-on-insulator wafers. Through both guided mode and bulk measurements, we demonstrate that the patterning of…
We report on the optical and mechanical characterization of arrays of parallel micromechanical membranes. Pairs of high-tensile stress, 100 nm-thick silicon nitride membranes are assembled parallel with each other with separations ranging…
Colloidal lithography [1] is how patterns are reproduced in a variety of natural systems and is used more and more as an efficient fabrication tool in bio-, opto-, and nano-technology. Nanoparticles in the colloid are made to form a mask on…
Silicon-based dielectric is crucial for many superconducting devices, including high-frequency transmission lines, filters, and resonators. Defects and contaminants in the amorphous dielectric and at the interfaces between the dielectric…
A focused ion beam is used to mill side holes in air-silica structured fibres. By way of example, side holes are introduced in two types of air-structured fibres (1) a photonic crystal four-ring fibre and (2) a 6-hole single ring step index…
To address the major challenges to obtain high spatial resolution in snapshot hyperspectral imaging, 3D printed glass lightguide array has been developed to sample the intermediate image in high spatial resolution and redistribute the…