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This work presents recent advances in the development and the integration of an electrochemical (chemicalelectrical energy conversion) micro power generator used as a high voltage energy source for RF-MEMS powering. Autonomous MEMS require…
Microscopic heat engines are microscale systems that convert energy flows between heat reservoirs into work or systematic motion. We have experimentally realized a minimal microscopic heat engine. It consists of a colloidal Brownian…
Designing a miniature microscale engine that can override the role of thermal fluctuations has remained elusive and is an important open challenge. Here we provide the design and theoretical framework for a unique information-based engine -…
The ``Shockless Explosion Combustion" (SEC) concept for gas turbine combustors, introduced in 2014, approximates constant volume combustion (CVC) by harnessing acoustic confinement of autoigniting gas packets. The resulting pressure waves…
Silicon, the main constituent of microprocessor chips, is emerging as a promising material for the realization of future quantum processors. Leveraging its well-established complementary metal-oxide-semiconductor (CMOS) technology would be…
For superconducting quantum processors, microwave signals are delivered to each qubit from room-temperature electronics to the cryogenic environment through coaxial cables. Limited by the heat load of cabling and the massive cost of…
This paper presents the design, fabrication, and experimental characterization of a peristaltic micropump. The micropump is composed of two layers fabricated from polydimethylsiloxane (PDMS) material. The first layer has a rectangular…
We discuss the problem of the optimal design of a micro-tubular fuel cell applying an inverse homogenization technique. Fuel cells are extremely clean and efficient electrochemical power generation devices, made up of a…
For modern Gas sensors, high sensitivity and low power are expected. This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors…
A micro-pressure sensor with an isosceles trapezoidal beam-membrane (ITBM) is proposed in this paper, consisting of a square silicon membrane, four isosceles trapezoidal beams and four piezoresistors.To investigate how the elastic silicon…
Ultra-thin crystal targets in shape of self-supporting membranes were produced for our experiments with parametric x-rays emitted by low-energy electrons. Concise description of the technology developed for production of silicon crystal…
Major challenges of micro thermal machines are the thermal insulation and mechanical tolerance in the case of sliding piston. Switching from piston to membrane in microengines can alleviate the latest and lead to planar architectures.…
This paper presents a polycrystalline silicon germanium (poly-SiGe) thermopile specially designed for thermoelectric generators used on human body. Both the design of the single thermocouple and the arrangement of the thermocouple array…
We developed a vacuum generation system composed of a reciprocating compressor (3 tons of refrigeration) with an inverted-function that is ready to be hooked flexibly to a gas-tight container to create an evacuated enclosed atmosphere,…
A new compact active turbulence generator is developed, tested, and characterized, which extends the capabilities of such generators used in turbulent premixed combustion research. The generator is composed of two blades that resemble the…
Nowadays microfabrication techniques originating from micro-electronics enable to create mechanical objects of micron-size. The field of Micro-Electro-Mechanical devices (MEMS) is continuously expanding, with an amazingly broad range of…
A PEM micro fuel cell system is described which is based on self-breathing PEM micro fuel cells in the power range between 1 mW and 1W. Hydrogen is supplied with on-demand hydrogen production with help of a galvanic cell, that produces…
By converting energy into mechanical work, engines play a central role in most biological and technological processes. In particular, within the current trend towards the development of nanoscience and nanotechnology, microscopic engines…
We report on an optimized micro-machined thermal flow-rate sensor as part of an autonomous multi-parameter sensing device for water network monitoring. The sensor has been optimized under the following constraints: low power consumption and…
Microring resonators made from silicon are becoming a popular microscale device format for generating photon pairs at telecommunications wavelengths at room temperature. In compact devices with a footprint less than $5\times 10^{-4}$…