Other Computer Science
A novel design for vortex modulation of a passive chaotic micromixer, named a circulation-disturbance micromixer (CDM), has been achieved and analyzed experimentally and numerically. The systematic numerical analyses - topological flow…
The ability to manipulate or separate a biological small particle, such as a living cell and embryo, is fundamental needed to many biological and medical applications. The insulator-based dielectrophoresis (iDEP) trapping is composed of…
A novel micro device with a mechanism of split and recombination (SNR) for rapid fluidic mixing and reaction, named a SNR micro-reactor, was designed, fabricated and systematically analyzed. This SNR micro-reactor possessing an in-plane…
PLGA (poly(lactic-co-glycolic acid)) is one of the most used biodegradable and biocompatible materials. Nanostructured PLGA even has great application potentials in tissue engineering. In this research, a fabrication technique for…
Electrostatic transducers for vibration energy scavenging have been an object to numerous studies, but are still facing major issues relating to their conditioning circuit. One of the most popular ones uses a charge pump and a flyback…
An electrostatic in-plane overlap varying energy harvester is modeled and simulated using a circuit simulator. Both linear and nonlinear models are investigated. The nonlinear model includes mechanical stoppers at the displacement extremes.…
Autonomous microsystems are confronted today to a major challenge : the one of energy supply. Energy scavenging, i.e. collecting energy from the ambient environment has been developed to answer this problematic. Various sources have already…
In this study, we developed a top/down methodology for behavioral and structural modeling of multi-domain microsystems. Then, we validated this methodology through a study case : a piezoelectric microgenerator. We also proved the…
Micro-indentation test with a micro flat-end cone indenter was employed to simulate micro embossing process and investigate the thermo-mechanical response of ceramic green substrates. The laminated low temperature co-fired ceramic green…
In this paper, we will report our achievements in developing large area patterning of multilayered ceramic green composites using roller embossing. The aim of our research is to pattern large area ceramic green composites using a modified…
In this paper, a practical micromachining technology was applied for the fabrication of a micro probe using a complex nontraditional machining process. A series process was combined to machine tungsten carbide rods from original dimension.…
The objective of this research was to study the influence of electroplating parameters on electrodeposit characteristics for the production of nickel (Ni) and nickel-iron (Ni-Fe) microparts by photoelectroforming. The research focused on…
In this paper the methodology and the results of a contactless thermal characterization of a high temperature test chamber will be introduced. The test chamber is used for fatigue testing of different MEMS devices where the homogenous…
Properties of typical MEMS materials have been widely investigated. Mechanical properties of MEMS structures depend not only on the bulk material properties, but also structural factors. A measurement system has been made to measure…
Thermal functional circuits are an interesting and perspectivic group of the MEMS elements. A practical realization is called Quadratic Transfer Characteristic (QTC) element which driving principle is the Seebeck-effect. In this paper we…
Multilayered ceramic substrates with embedded micro patterns are becoming increasingly important, for example, in harsh environment electronics and microfluidic devices. Fabrication of these embedded micro patterns, such as micro channels,…
Conductive micro-patterned copper tracks were fabricated by UV direct-writing of a nanoparticle silver seed layer followed by selective electroless copper deposition. Silver ions were first incorporated into a hydrolyzed polyimide surface…
A novel way of filling high aspect ratio vertical interconnection (microvias) with an aspect ratio of >2:1 is presented. High frequency acoustic streaming at megasonic frequencies enables the decrease of the Nernst-diffusion layer down to…
Potential core materials to supersede ferrite in the 0.5-10 MHz frequency range are investigated. The performance of electrodeposited nickel-iron, cobalt-iron-copper alloys and the commercial alloy Vitrovac 6025 have been assessed through…
A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. Simulations and measured results are presented for…