Characterization and Modeling of an Electro-thermal MEMS Structure
Other Computer Science
2008-12-18 v1
Abstract
Thermal functional circuits are an interesting and perspectivic group of the MEMS elements. A practical realization is called Quadratic Transfer Characteristic (QTC) element which driving principle is the Seebeck-effect. In this paper we present the analyses of a QTC element from different perspectives. To check the real behavior of the device, we measured a few, secondary properties of the structure which correspond to special behavior because these properties can not be easily derived from the main characteristics.
Cite
@article{arxiv.0805.0863,
title = {Characterization and Modeling of an Electro-thermal MEMS Structure},
author = {P. G. Szabo and Vladimir Szekely},
journal= {arXiv preprint arXiv:0805.0863},
year = {2008}
}
Comments
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)