Other Computer Science
The goal is the development of a novel principle for the temperature acquisition of refrigerants in CO2 air conditioning systems. The new approach is based on measuring the temperature inside a pressure sensor, which is also needed in the…
This paper presents a numerical simulation and experimental results of a one-dimensional thermal inclinometer with the cavity filled of gas and liquid. The sensor principle consists of one heating resistor placed between two detectors. When…
Micro lens array is crucial in various kinds of optical and electronic applications. A micro lens array with high numerical aperture (NA) and low aberration is in particular needed. This research is aimed to design and fabricate such a…
Thermal micro-actuators are a promising solution to the need for large-displacement, gentle handling force, low-power MEMS actuators. Potential applications of these devices are micro-relays, assembling and miniature medical…
A simple and effective method to fabricate a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling a printing gap…
In this paper, the bulge test is used to determine the mechanical properties of very thin dielectric membranes. Commonly, this experimental method permits to determine the residual stress (s0) and biaxial Young's modulus (E/(1-u)).…
This paper describes the development of metallic bipolar plate fabrication using micro-electroforming process for mini-DMFC (direct methanol fuel cell) stacks. Ultraviolet (UV) lithography was used to define micro-fluidic channels using a…
The technique of laser-assisted nanoimprinting lithography (LAN) has been proposed to utilize an excimer laser to irradiate through a quartz mold and melts a thin polymer film on the substrate for micro- to nano-scaled fabrications. In the…
Microcantilever specimens for in-plane and out-ofplane bending tests are here analyzed. Experimental validation of 2D and 3D numerical models is performed. Main features of in-plane and out-of-plane layouts are then discussed. Effectiveness…
In this paper an experimental validation of numerical approaches aimed to predict the coupled behaviour of microbeams for out-of-plane bending tests is performed. This work completes a previous investigation concerning in plane microbeams…
Measured damping coefficients of six different perforated micromechanical test structures are compared with damping coefficients given by published compact models. The motion of the perforated plates is almost translational, the surface…
The fabrication and experimental characterization of a thermal flow meter, capable of detecting and measuring two independent gas flows with a single chip, is described. The device is based on a 4 x 4 mm2 silicon chip, where a series of…
A thermal flow sensor has been realised consisting of freely-suspended silicon-rich silicon-nitride microchannels with an integrated Al/poly-Si++ thermopile in combination with up- and downstream Al heater resistors. The inherently zero…
In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched…
We present a nanomechanical device design to be used in a non-volatile mechanical memory point. The structure is composed of a suspended slender nanowire (width : 100nm, thickness 430nm length : 8 to 30$\mu$m) clamped at its both ends.…
The analytical models that predict thermal and mechanical responses of microactuator have been developed. These models are based on electro thermal and thermo mechanical analysis of the microbeam. Also, Finite Element Analysis (FEA) is used…
We report on the hot roller embossing of polymer sheets for the creation of microfluidic structures. Measurements conducted on 100 $\mu$m features showed that the lateral dimensions could be replicated to within 2% tolerance, while over 85%…
The integration of a PDMS membrane within orthogonally placed PMMA microfluidic channels enables the pneumatic actuation of valves within bonded PMMA-PDMS-PMMA multilayer devices. Here, surface functionalization of PMMA substrates via acid…
This paper presents a microfluidic device for magnetophoretic separation red blood cells from blood under contionous flow. The separation method consist of continous flow of a blood sample (diluted in PBS) through a microfluidic channel…
This paper is to describe a design and fabrication method for a valve-less peristaltic micro-pump. The valve-less peristaltic micro-pump with three membrane chambers in a serial is actuated by three piezoelectric (PZT) actuators. With the…