The ability to generate a change of the lattice parameter in a near-surface layer of a controllable thickness by ion implantation of strontium titanate is reported here using low energy He+ ions. The induced strain follows a distribution within a typical near-surface layer of 200 nm as obtained from structural analysis. Due to clamping effect from the underlying layer, only perpendicular expansion is observed. Maximum distortions up to 5-7% are obtained with no evidence of amorphisation at fluences of 1E16 He+ ions/cm2 and ion energies in the range 10-30 keV.
@article{arxiv.1010.6152,
title = {Tailoring strain in SrTiO3 compound by low energy He+ irradiation},
author = {S. Autier-Laurent and O. Plantevin and P. Lecoeur and B. Decamps and A. Gentils and C. Bachelet and O. Kaitasov and G. Baldinozzi},
journal= {arXiv preprint arXiv:1010.6152},
year = {2015}
}
Comments
11 pages, 4 figures, Accepted for publication in Europhysics Letter (http://iopscience.iop.org/0295-5075)