Stressor-Layer-Induced Elastic Strain Sharing in SrTiO3 Complex Oxide Sheets

J. A. Tilka; J. Park; Y. Ahn; A. Pateras; Z. Cai; P. G. Evans

doi:10.1063/1.5019920

Stressor-Layer-Induced Elastic Strain Sharing in SrTiO3 Complex Oxide Sheets

Materials Science 2020-02-27 v1

Authors: J. A. Tilka , J. Park , Y. Ahn , A. Pateras , Z. Cai , P. G. Evans

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Abstract

A precisely selected elastic strain can be introduced in submicron-thick single-crystal SrTiO3 sheets using a silicon nitride stressor layer. A conformal stressor layer deposited using plasma-enhanced chemical vapor deposition produces an elastic strain in the sheet consistent with the magnitude of the nitride residual stress. Synchrotron x-ray nanodiffraction reveals that the strain introduced in the SrTiO3 sheets is on the order of 10 4, matching the predictions of an elastic model. This approach to elastic strain sharing in complex oxides allows the strain to be selected within a wide and continuous range of values, an effect not achievable in heteroepitaxy on rigid substrates.

Keywords

strain engineering mechanics of materials silicon physics

Cite

@article{arxiv.2002.11287,
  title  = {Stressor-Layer-Induced Elastic Strain Sharing in SrTiO3 Complex Oxide Sheets},
  author = {J. A. Tilka and J. Park and Y. Ahn and A. Pateras and Z. Cai and P. G. Evans},
  journal= {arXiv preprint arXiv:2002.11287},
  year   = {2020}
}

Stressor-Layer-Induced Elastic Strain Sharing in SrTiO3 Complex Oxide Sheets

Abstract

Keywords

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