Silicon ferroelectric field-effect transistors (FeFETs) with low-k interfacial layer (IL) between ferroelectric gate stack and silicon channel suffers from high write voltage, limited write endurance and large read-after-write latency due to early IL breakdown and charge trapping and detrapping at the interface. We demonstrate low voltage, high speed memory operation with high write endurance using an IL-free back-end-of-line (BEOL) compatible FeFET. We fabricate IL-free FeFETs with 28nm channel length and 126nm width under a thermal budget <400C by integrating 5nm thick Hf0.5Zr0.5O2 gate stack with amorphous Indium Tungsten Oxide (IWO) semiconductor channel. We report 1.2V memory window and read current window of 10^5 for program and erase, write latency of 20ns with +/-2V write pulses, read-after-write latency <200ns, write endurance cycles exceeding 5x10^10 and 2-bit/cell programming capability. Array-level analysis establishes IL-free BEOL FeFET as a promising candidate for logic-compatible high-performance on-chip buffer memory and multi-bit weight cell for compute-in-memory accelerators.
@article{arxiv.2105.11078,
title = {Logic Compatible High-Performance Ferroelectric Transistor Memory},
author = {Sourav Dutta and Huacheng Ye and Abhishek Khanna and Yuan-Chun Luo and Lillian Pentecost and Akif A. Khandker and Wriddhi Chakraborty and Gu-Yeon Wei and David Brooks and Michael Niemier and Xiaobo Sharon Hu and Shimeng Yu and Kai Ni and Suman Datta},
journal= {arXiv preprint arXiv:2105.11078},
year = {2022}
}