This paper discusses questions of synthesizing and pressing vanadium oxides to create film-forming materials that can be used in producing optical coatings. Based on the film-forming materials thus created, technological processes have been developed for fabricating coatings from vanadium dioxide by two methods of producing thin films: vacuum evaporation and magnetron sputtering. Questions of using films made from vanadium oxide in optical instrumentation are considered.
@article{arxiv.1703.00127,
title = {Infrared properties of micromachined vanadium oxide thin films},
author = {Martin Rees and Haifei Wang and Thomas Decker and Robinson L. Smith},
journal= {arXiv preprint arXiv:1703.00127},
year = {2017}
}