High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors
Instrumentation and Detectors
2016-09-20 v3 Optics
Abstract
Micro/Nano Electro Mechanical Systems (MEMS/NEMS) provide the engineer with a powerful set of solutions to a wide variety of technical challenges. However, because they are mechanical systems, response times can be a limitation. In some situations, advanced engineered drive techniques can improve response times by as much as a thousand, significantly opening up the application space for MEMS/NEMS solutions.
Keywords
Cite
@article{arxiv.1512.05297,
title = {High speed control of electro-mechanical transduction Advanced Drive Techniques for Optimized Step-and-Settle Response of MEMS Micromirrors},
author = {Matthias Imboden and Jackson Chang and Corey Pollock and Evan Lowell and Mehmet Akbulut and Jessica Morrison and Thomas Stark and Thomas G. Bifano and David J. Bishop},
journal= {arXiv preprint arXiv:1512.05297},
year = {2016}
}
Comments
37 pages, 20 figures