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Nanoelectromechanical systems, or NEMS, are MEMS scaled to submicron dimensions. In this size regime, it is possible to attain extremely high fundamental frequencies while simultaneously preserving very high mechanical responsivity (small…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 M. L. Roukes

Nanoelectromechanical systems (NEMS) are nano-to-micrometer scale mechanical resonators coupled to electronic devices of similar dimensions. NEMS show promise for fast, ultrasensitive force microscopy and for deepening our understanding of…

Mesoscale and Nanoscale Physics · Physics 2015-06-25 M. P. Blencowe

A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented…

Optics · Physics 2018-02-16 Leonardo Midolo , Albert Schliesser , Andrea Fiore

Nanoelectromechanical systems (NEMS) are devices integrating electrical and mechanical functionality on the nanoscale. Because of individual electron tunneling, such systems can show rich self-induced, highly non-linear dynamics. We show…

Mesoscale and Nanoscale Physics · Physics 2021-10-13 Christopher W. Wächtler , Alan Celestino , Alexander Croy , Alexander Eisfeld

We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic…

Optics · Physics 2015-05-13 Caleb Knoernschild , Changsoon Kim , Felix P. Lu , Jungsang Kim

Current developments of high-speed magnetic levitation technology using the principle of the electromagnet suspension (EMS) focus on reaching vehicle speeds of more than 600 km/h. With increasing vehicle speeds, however, updated control…

Systems and Control · Electrical Eng. & Systems 2026-03-11 Arnim Kargl , Mario Hermle , Zhiqiang Zhang , Yanmin Li , Dainan Zhao , Yong Cui , Peter Eberhard

The implementation of on-chip MEMS/NEMS transducers for arbitrary resonators is difficult due to a number of difficulties such as material choice, large dissipation, restriction in high frequency, low sensitivity, poor reliability, and poor…

Applied Physics · Physics 2018-05-21 Meiyong Liao , Liwen Sang , Tokuyuki Teraji , Satoshi Koizumi , Yasuo Koide

The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sense or control physical, optical or chemical quantities, ICs…

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

Instrumentation and Detectors · Physics 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

Energy management strategies (EMSs) are the most significant components in hybrid electric vehicles (HEVs) because they decide the potential of energy conservation and emission reduction. This work presents a transferred EMS for a parallel…

Signal Processing · Electrical Eng. & Systems 2020-07-17 Teng Liu , Xiaolin Tang , Jiaxin Chen , Hong Wang , Wenhao Tan , Yalian Yang

The development of rotary nanomotors is crucial for further advancing NEMS technology. In this work, we report innovative design, assembly, and rotation of ordered arrays of nanomotors. The nanomotors were bottom-up assembled from nanoscale…

Mesoscale and Nanoscale Physics · Physics 2015-06-18 Kwanoh Kim , Xiaobin Xu , D. L. Fan

Nanoelectromechanical Systems (NEMS) are among the best candidates to measure interactions at nanoscale [1-6], especially when resonating oscillators are used with high quality factor [7, 8]. Despite many efforts [9, 10], efficient and easy…

As optical telecommunication networks become more complex, there is an emerging need for systems capable of very complex switching and manipulation of large numbers of optical signals. MEMS enable these systems by combining excellent…

A multi-level tunable reflection array wide-angle beam scanning method is proposed to address the limited bandwidth and small scanning angle issues of current terahertz beam scanning technology. In this method, a focusing lens and its array…

Optics · Physics 2024-09-09 Weihua Yu , Hong Peng , Mingze Li , Haolin Li , Yuan Xue , Huikai Xie

Optical metasurfaces (OMSs) have shown unprecedented capabilities for versatile wavefront manipulations at the subwavelength scale, thus opening fascinating perspectives for next generation ultracompact optical devices and systems. However,…

We demonstrate a class of model nano-electromechanical systems (NEMS) based on multiwalled carbon nanotubes (MWNTs) which has longer inner cores coaxially oscillating inside their respective shorter outer shell holders and can operate at…

Materials Science · Physics 2007-09-26 Quan-shui Zheng , Zhiping Xu , Adrian Neild , Tuck Wah Ng

Micro/nano electro-mechanical systems (MEMS/NEMS) are constantly attracting an increasing attention for their relevant technological applications in fields ranging from biology, medicine, ecology, energy to industry. Most of the…

Materials Science · Physics 2021-03-10 Omar Tricinci , Marco Carlotti , Andrea Desii , Fabian Meder , Virgilio Mattoli

Over the last decade the successful design and fabrication of complex MEMS (MicroElectroMechanical Systems), optical circuits and ASICs have been demonstrated. Packaging and integration processes have lagged behind MEMS research but are…

Other Computer Science · Computer Science 2007-11-29 M. -A. Polosky , E. -J. Garcia

Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of…

This paper reviews some of our contributions to reconfigurable metamaterials, where dynamic control is enabled by micro-electro-mechanical systems (MEMS) technology. First, we show reconfigurable composite right/left handed transmission…

Optics · Physics 2014-05-08 Tomislav Debogovic , Julien Perruisseau-Carrier
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