Fast simulation method for parameter reconstruction in optical metrology
Optics
2013-04-17 v1 Computational Physics
Abstract
A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications.
Cite
@article{arxiv.1304.4367,
title = {Fast simulation method for parameter reconstruction in optical metrology},
author = {S. Burger and L. Zschiedrich and J. Pomplun and F. Schmidt and B. Bodermann},
journal= {arXiv preprint arXiv:1304.4367},
year = {2013}
}