hp-finite element method for simulating light scattering from complex 3D structures
Optics
2015-03-24 v1 Computational Physics
Abstract
Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.
Cite
@article{arxiv.1503.06617,
title = {hp-finite element method for simulating light scattering from complex 3D structures},
author = {S. Burger and L. Zschiedrich and J. Pomplun and S. Herrmann and F. Schmidt},
journal= {arXiv preprint arXiv:1503.06617},
year = {2015}
}