Method for fast computation of angular light scattering spectra from 2D periodic arrays
Optics
2016-03-15 v1 Computational Physics
Abstract
An efficient numerical method for computing angle-resolved light scattering off periodic arrays is presented. The method combines finite-element discretization with a Schur complement solver. A significant speed-up of the computations in comparison to standard finite-element method computations is observed.
Keywords
Cite
@article{arxiv.1603.04169,
title = {Method for fast computation of angular light scattering spectra from 2D periodic arrays},
author = {J. Pomplun and S. Burger and L. Zschiedrich and P. Gutsche and F. Schmidt},
journal= {arXiv preprint arXiv:1603.04169},
year = {2016}
}
Comments
Proceedings article, SPIE conference "Metrology, Inspection, and Process Control for Microlithography XXX"