We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.
@article{arxiv.1707.08467,
title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion},
author = {M. Hammerschmidt and M. Weiser and X. Garcia Santiago and L. Zschiedrich and B. Bodermann and S. Burger},
journal= {arXiv preprint arXiv:1707.08467},
year = {2017}
}
Comments
Proceedings article, SPIE conference "Modeling Aspects in Optical Metrology VI"