We demonstrate epitaxial lattice-matched Al0.89Sc0.11N/GaN ten and twenty period distributed Bragg reflectors (DBRs) grown on c-plane bulk n-type GaN substrates by plasma-enhanced molecular beam epitaxy (PA-MBE). Resulting from a rapid increase of in-plane lattice coefficient as scandium is incorporated into AlScN, we measure a lattice-matched condition to c-plane GaN for a Sc content of just 11\%, resulting in a large refractive index mismatch Δn greater than 0.3 corresponding to an index contrast of Δn/nGaN = 0.12 with GaN. The DBRs demonstrated here are designed for a peak reflectivity at a wavelength of 400 nm reaching a reflectivity of 0.98 for twenty periods. It is highlighted that AlScN/GaN multilayers require fewer periods for a desired reflectivity than other lattice-matched Bragg reflectors such as those based on AlInN/GaN multilayers.
@article{arxiv.2309.16551,
title = {Epitaxial lattice-matched Al$_{0.89}$Sc$_{0.11}$N/GaN distributed Bragg reflectors},
author = {Len van Deurzen and Thai-Son Nguyen and Joseph Casamento and Huili Grace Xing and Debdeep Jena},
journal= {arXiv preprint arXiv:2309.16551},
year = {2023}
}