相关论文: Integrated optical force sensors using focusing ph…
The new generation of strained silicon nitride resonators harbors great promise for scanning force microscopy, especially when combined with the extensive toolbox of cavity optomechanics. However, accessing a mechanical resonator inside an…
We have realized a suspended, high-reflectivity focusing metamirror ($f\approx 10$ cm, $\mathcal{R} \approx 99\%$) by non-periodic photonic crystal patterning of a Si$_3$N$_4$ membrane. The design enables construction of a stable, short…
This chapter describes the basic design, simulation, and fabrication for fully Si integrated, waveguide coupled, optomechanical force and displacement sensors. The approach of full Si integration of all stationary nanophotonic components…
Magnetic field sensors with high sensitivity and spatial resolution have profoundly impacted diverse applications ranging from geo-positioning and navigation to medical imaging, materials science, and space exploration. However, the use of…
Achieving optimal force sensitivity with nanomechanical resonators requires the ability to resolve their thermal vibrations. In two-dimensional resonators, this can be done by measuring the energy they absorb while vibrating in an optical…
Nanomechanical resonators can serve as ultrasensitive, miniaturized force probes. While vertical structures like nanopillars are ideal for this purpose, transducing their motion is challenging. Pillar-based photonic crystals (PhCs) offer a…
We report the development of a scanning force microscope based on an ultra-sensitive silicon nitride membrane transducer. Our development is made possible by inverting the standard microscope geometry - in our instrument, the substrate is…
We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane,…
Multi-element cavity optomechanics constitutes a direction to observe novel effects with mechanical resonators. Several exciting ideas include superradiance, increased optomechanical coupling, and quantum effects between distinct mechanical…
High-stress silicon nitride (Si3N4) membranes represent the state-of-the-art for cavity optomechanics, combining ultralow dissipation, optical transparency, and full compatibility with wafer-scale nanofabrication. Yet their integration into…
Photonic integrated circuit devices can be used as refractometric opto-fluidic sensors to detect the presence of analytes in solution at low concentrations. In this work, we investigate the refractive index sensitivity of silicon nitride…
Optomechanical sensors enable exquisitely sensitive force measurements, with emerging applications across quantum technologies, standards, fundamental science, and engineering. Magnetometry is among the most promising applications, where…
Optical forces in guided-wave nanostructures have recently been proposed as an effective means of mechanically actuating and tuning optical components. In this work, we study the properties of a photonic crystal optomechanical cavity…
We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8*10^5 for optomechanical applications. The reflectors are silicon nitride membranes patterned with…
An increasing number of studies are moving towards the combination of quantum mechanics and gravity, where studying gravity from a very small source mass is a viable starting point. Preparing for such experiments, investigations of weak…
We report on the injection locking of an optically levitated nanomechanical oscillator (a silica nanosphere) to resonant intensity modulations of an external optical signal. We explore the characteristic features of injection locking in…
A fully on-fiber optomechanical cavity is fabricated by patterning a suspended metallic mirror on the tip of an optical fiber. Optically induced self-excited oscillations of the suspended mirror are experimentally demonstrated. We discuss…
In a canonical optomechanical system, mechanical vibrations are dynamically encoded on an optical probe field which reciprocally exerts a backaction force. Due to the weak single photon coupling strength achieved with macroscopic…
We present here an optomechanical system fabricated with novel stress management techniques that allow us to suspend an ultrathin defect-free silicon photonic-crystal membrane above a Silicon-on-Insulator (SOI) substrate with a gap that is…
We propose and design a stoichiometric silicon-nitride membrane resonator featuring highly reflective at multi-wavelengths and high mechanical quality factor. The membrane resonator has a thickness of 100 nm and 2D-photonic and phononic…