相关论文: Characterisation of the influence function non-add…
We present modeling and analysis of a hysteretic deformable mirror where the facesheet interacts with a continuous layer of piezoelectric material that can be actuated distributively by a matrix of electrodes through multiplexing. Moreover,…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
For sufficiently wide ranges of applied control signals (control voltages), MEMS and piezoelectric Deformable Mirrors (DMs), exhibit nonlinear behavior. The nonlinear behavior manifests itself in nonlinear actuator couplings, nonlinear…
Variable curvature mirrors of large amplitude are designed by using finite element analysis. The specific case studied reaches at least a 800 {\mu}m sag with an optical quality better than {\lambda}/5 over a 120 mm clear aperture. We…
In this paper we present a Deformable Mirror (DM) based on the continuous voltage distribution over a resistive layer. This DM can correct the low order aberrations (defocus, astigmatism, coma and spherical aberration) using three…
High-contrast imaging of extrasolar planet candidates around a main-sequence star has recently been realized from the ground using current adaptive optics (AO) systems. Advancing such observations will be a task for the Gemini Planet…
We present a simple technique to produce active Q-switching in various types of fiber amplifiers by active integration of an electrostatic actuated deformable metallic micro-mirror. The optical MEMS (MOEMS) device acts as one of the laser…
Advances in micro deformable mirror (DM) technologies such as MEMs, have stimulated interest in the characteristics of systems that include a high stroke mirror in series with a high actuator count mirror. This arrangement is referred to as…
This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror,…
Advancements in making high-efficiency actuators are an enabling technology for building the next generation of large-format deformable mirrors. The Netherlands Organization for Applied Scientific Research (TNO) has developed a new style of…
We present two concepts of deformable mirror to compensate for first order optical aberrations. Deformation systems are designed using both elasticity theory and Finite Element Analysis in order to minimize the number of actuators. Starting…
In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in…
Deformable Mirrors (DMs) have wide applications ranging from astronomical imaging to laser communications and vision science. However, they often require bulky multi-channel cables for delivering high power to their drive actuators. A low…
Planned instruments utilising multi-object adaptive optics systems on the forthcoming extremely large telescopes require large numbers of high order deformable mirrors. These devices are a significant cost driver, particularly if…
We performed closed-loop lab testing of large-format deformable mirrors (DMs) with hybrid variable reluctance actuators. TNO has been developing the hybrid variable reluctance actuators in support for a new generation of adaptive secondary…
We present the experimental performance of a 91-actuator deformable mirror made of a magnetic liquid (ferrofluid) using a new technique that linearizes the response of the mirror by superposing a uniform magnetic field to the one produced…
Deformable mirrors are increasingly used in astronomy. However, they still are limited in stroke for active correction of high amplitude optical aberrations. Magnetic Liquid deformable mirrors (MLDMs) are a new technology that has…
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…
Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS…
The need for both high quality images and lightweight structures is one of the main drivers in space telescope design. An efficient wavefront control system will become mandatory in future large observatories, retaining performance while…