相关论文: Cavity optomechanics with stoichiometric SiN films
Optomechanical systems show tremendous promise for high sensitivity sensing of forces and modification of mechanical properties via light. For example, similar to neutral atoms and trapped ions, laser cooling of mechanical motion by…
In a recent publication [K. Hammerer et al., Phys. Rev. Lett. 103, 063005 (2009)] we have shown the possibility to achieve strong coupling of the quantized motion of a micron-sized mechanical system to the motion of a single trapped atom.…
We present a fully quantum theory describing the cooling of a cantilever coupled via radiation pressure to an illuminated optical cavity. Applying the quantum noise approach to the fluctuations of the radiation pressure force, we derive the…
We present our current progress on the design and test of Ti/TiN Multilayer for use in Kinetic Inductance Detectors (KIDs). Sensors based on sub-stoichiometric TiN film are commonly used in several applications. However, it is difficult to…
A detailed investigation of the structural and vibrational properties of various prestressed silicon nitride membranes patterned with one-dimensional photonic crystal structures is presented. The tensile stress-related deformation of the…
We demonstrate sideband-resolved Si$_3$N$_4$ optomechanical crystals supporting $10^5$ quality factor optical modes at 980 nm, coupled to $\approx4$ GHz frequency mechanical modes with quality factors of $\approx3000$. Optomechanical…
In this work we combine the large per-photon optical gradient force with the sensitive feedback of a high quality factor whispering-gallery microcavity. The cavity geometry, consisting of a pair of silica disks separated by a nanoscale gap,…
Material absorption is a key limitation in nanophotonic systems; however, its characterization is often obscured by scattering and diffraction loss. Here we show that nanomechanical frequency spectroscopy can be used to characterize the…
Freestanding Silicon nitride (SiN) devices are central to the field of nanomechanical resonators and for other technology applications such as transmission electron imaging and nanopore bioassays. The nanofabrication techniques used for…
The noise from laser phase fluctuation sets a major technical obstacle to cool the nano-mechanical oscillators to the quantum region. We propose a cooling configuration based on the opto-mechanical coupling with two cavity modes to…
We have measured the heat conduction between 0.05 K and 1.0 K of high purity silicon wafers carrying on their polished faces a variety of thin dielectric films and polycrystalline thin metallic films. Using a Monte Carlo simulation to…
We present a design methodology and analysis of a cavity optomechanical system in which a localized GHz frequency mechanical mode of a nanobeam resonator is evanescently coupled to a high quality factor (Q>10^6) optical mode of a separate…
We investigate the optomechanical properties of tensile-strained ternary InGaP nanomembranes grown on GaAs. This material system combines the benefits of highly strained membranes based on stoichiometric silicon nitride, with the unique…
10 H SiC thin films are potential candidates for devices that can be used in high temperature and high radiation environment. Measurement of thermal conductivity of thin films by a non-invasive method is very useful for such device…
We present optical sideband spectroscopy measurements of a mesoscopic mechanical oscillator cooled near its quantum ground state. The mechanical oscillator, corresponding to a 3.99GHz acoustic mode of a patterned silicon nanobeam, is…
We demonstrate a cryogenic optomechanical system comprising a flexible Si3N4 membrane placed at the center of a free-space optical cavity in a 400 mK cryogenic environment. We observe a mechanical quality factor Q > 4 x 10^6 for the 261-kHz…
The low frequency complex impedance of a high resistivity 92 {\mu}{\Omega} cm and 100 nm thick TiN superconducting film has been measured via the transmission of several high sensitivity GHz microresonators, down to Tc/50. The temperature…
Generating non-classical states of light by opto-mechanical coupling depends critically on the mechanical and optical properties of micro-oscillators and on the minimization of thermal noise. We present an oscillating micro-mirror with a…
Optical forces in guided-wave nanostructures have recently been proposed as an effective means of mechanically actuating and tuning optical components. In this work, we study the properties of a photonic crystal optomechanical cavity…
High-stress Si$_3$N$_4$ nanoresonators have become an attractive choice for electro- and optomechanical devices. Membrane resonators can achieve quality factor ($Q$) - frequency ($f$) products exceeding $10^{13}$ Hz, enabling (in principle)…