Soft X-ray Reflection Ptychography
Abstract
Scanning transmission X-ray microscopy and ptychography have become mature tools for high-resolution, element-specific imaging of nanoscale structures. However, transmission geometries impose stringent constraints on sample thickness and preparation, thereby limiting investigations of extended or bulk specimens, especially in the soft X-ray region. Here, we demonstrate reflection geometry soft X-ray ptychography as a robust imaging mode. Instrumental feasibility and spatial resolution are established using a lithographically defined Siemens star and barcode test pattern on a multilayer substrate. We empirically demonstrate a full-pitch spatial resolution of ca. 45 nm from Fourier ring correlation analysis of the reconstructed object. The results highlight the potential of the reflection geometry for nondestructive X-ray studies of materials without the need for transmissive samples.
Cite
@article{arxiv.2601.20261,
title = {Soft X-ray Reflection Ptychography},
author = {Damian Guenzing and Dayne Y. Sasaki and Alexander S. Ditter and Abraham L. Levitan and Eric M. Gullikson and Scott Dhuey and Arian Gashi and Hendrik Ohldag and Sujoy Roy and David A. Shapiro and Riccardo Comin and Sophie A. Morley},
journal= {arXiv preprint arXiv:2601.20261},
year = {2026}
}
Comments
8 pages, 3 figures