Simultaneous High-Fidelity Single-Qubit Gates in a Spin Qubit Array

Silicon spin qubits are a promising platform for scalable quantum computing due to their compatibility with industrial semiconductor fabrication and the recent scaling to multi-qubit devices. Control fidelities above the 99% fault-tolerant threshold are routinely achieved, but extending high-fidelity control to simultaneous multi-qubit operation remains a major challenge. We demonstrate high-fidelity, fully parallel control of five silicon spin qubits using a single shared microwave line. Using tailored control pulses, all qubits achieve primitive $\pi/2$ gate fidelities well above 99.99%, with some approaching 99.999%, exceeding previously reported fidelities in silicon spin qubits. These fidelities are mostly preserved during simultaneous operation of up to three qubits, and remain at the practical fault-tolerant threshold of 99.9% even during fully parallel five-qubit operation. This performance is enabled by a calibration scheme that compensates drive-induced phase shifts using only pairwise calibrations, scaling quadratically with qubit number and avoiding exponential overhead. By reducing the number of impedance-controlled microwave lines, our approach addresses a key architectural bottleneck and offers a scalable control strategy for high-fidelity operation in large spin qubit arrays.