皮秒激光辐照诱导熔融石英中的偏振不敏感空间选择性刻蚀
光学
2020-01-08 v1 应用物理
摘要
众所周知,当以聚焦飞秒激光束辐照熔融石英时,可实现空间选择性化学刻蚀。刻蚀速率对激光偏振敏感。令人惊讶的是,我们观察到将傅里叶变换极限飞秒激光脉冲啁啾为皮秒脉冲后,刻蚀速率的偏振依赖性消失,同时仍可保持高效的刻蚀速率。扫描电子显微镜观察显示,啁啾脉冲可在辐照区诱导出相互连通的纳米裂纹,从而促进刻蚀剂高效进入微通道。所报道的技术对三维(3D)微流控系统及基于玻璃的 3D 打印制造极有用处。
引用
@article{arxiv.1812.10661,
title = {Polarization-insensitive space-selective etching in fused silica induced by picosecond laser irradiation},
author = {Xiaolong Li and Jian Xu and Zijie Lin and Jia Qi and Peng Wang and Wei Chu and Zhiwei Fang and Zhenhua Wang and Zhifang Chai and Ya Cheng},
journal= {arXiv preprint arXiv:1812.10661},
year = {2020}
}
备注
9 pages, 5 figures, 1 table