A synchrotron-based kilowatt-level radiation source for EUV lithograph
Accelerator Physics
2021-10-19 v1
Abstract
A compact damping ring with limited circumference of about 160 m is proposed for producing kilowatt-level coherent EUV radiation. The electron bunch in the ring is modulated by a 257nm wavelength laser with the help of the angular dispersion induced micro-bunching method [C. Feng and Z. Zhao, Sci. Rep. 7, 4724 (2017)]. Coherent radiation at 13.5 nm with an average power of about 2.5 kW can be achieved with the state-of-the-art accelerator and laser technologies.
Cite
@article{arxiv.2110.08987,
title = {A synchrotron-based kilowatt-level radiation source for EUV lithograph},
author = {Bocheng Jiang and Chao Feng and Changliang Li and Zhenghe Bai and Weishi Wan and Dao Xiang and Qiang Gu and Kun Wang and Qinglei Zhang and Dazhang Huang and Senyu Chen},
journal= {arXiv preprint arXiv:2110.08987},
year = {2021}
}