Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths
Abstract
We present spatial coherence measurements of extreme-ultraviolet light generated using the process of high-harmonic upconversion of a femtosecond laser. Using a phase-matched hollow-fiber geometry, the generated beam is found to exhibit essentially full spatial coherence. The coherence of this laser-like EUV source is demonstrated by recording Gabor holograms of small objects. This work demonstrates the capability to do EUV holography using a tabletop experimental setup. Such an EUV source, with low divergence and high spatial coherence, can be used for experiments such as high-precision metrology, inspection of optical components for EUV lithography (1), and for microscopy and holography (2) with nanometer resolution. Furthermore, the short time duration of the EUV radiation (a few femtoseconds) will enable EUV microscopy and holography to be performed with ultrahigh time resolution.
Keywords
Cite
@article{arxiv.2403.19750,
title = {Generation of Spatially Coherent Light at Extreme Ultraviolet Wavelengths},
author = {Randy A. Bartels and Ariel Paul and Hans Green and Henry C. Kapteyn and Margaret M. Murnane and Sterling Backus and Ivan P. Christov and Yanwei Liu and David Attwood and Chris Jacobsen},
journal= {arXiv preprint arXiv:2403.19750},
year = {2024}
}
Comments
16 pages, 4 figures