Related papers: Extreme Ultraviolet (EUV) Sources for Lithography …
High-intensity laser pulses covering the ultraviolet to terahertz spectral regions are nowadays routinely generated in a large number of laboratories. In contrast, intense extreme-ultraviolet (XUV) pulses have only been demonstrated using a…
Extreme Ultraviolet (EUV) lithography is the newest technology that will be used in the semiconductor industry for printing circuitry in the sub-20 nm scale. Low-energy electrons (LEEs) produced upon illumination of resist materials with…
We present spatial coherence measurements of extreme-ultraviolet light generated using the process of high-harmonic upconversion of a femtosecond laser. Using a phase-matched hollow-fiber geometry, the generated beam is found to exhibit…
We present the results of spectroscopic measurements in the extreme ultraviolet (EUV) regime (7-17 nm) of molten tin microdroplets illuminated by a high-intensity 3-J, 60-ns Nd:YAG laser pulse. The strong 13.5 nm emission from this…
We applied a tabletop, ultrafast, high-harmonic generation (HHG) source to measure the element-specific ferromagnetic resonance (FMR) in ultra-thin magnetic alloys and multilayers on an opaque Si substrate. We demonstrate a continuous wave…
Extreme-ultraviolet (XUV) sources including high-harmonic generation, free-electron lasers, soft x-ray lasers and laser-driven plasmas are widely used for applications ranging from femtochemistry and attosecond science to coherent…
We report on a compact and spectrally intense extreme-ultraviolet (XUV) source, which is based on high-harmonic generation (HHG) driven by 395 nm pulses. In order to minimize the XUV virtual source size and to maximize the XUV flux, HHG is…
In the past decade, the fourth-generation light source based on the combination of Energy Recovery Linac (ERL) and Free-Electron Laser (FEL) using superconducting linear accelerators has garnered significant attention. It holds immense…
Each successive generation of x-ray machines has opened up new frontiers in science, such as the first radiographs and the determination of the structure of DNA. State-of-the-art x-ray sources can now produce coherent high brightness keV…
Petawatt-class lasers can produce multi-GeV electron beams through laser wakefield electron acceleration. As a by-product, the accelerated electron beams can generate broad synchrotron-like radiation known as betatron radiation. In the…
We present a source of coherent extreme ultraviolet (XUV) radiation with a flux of 10$^{13}$ photons per second at 26.5 eV. The source is based on high-harmonic generation (HHG) in argon and pumped by a frequency-doubled 100 kHz repetition…
We report on the generation of intense extreme ultraviolet (EUV) supercontinuum with photon energies spanning from 35 eV to 50 eV (i. e., supporting an isolated attosecond pulse with a duration of ~271 as) by loosely focusing 35 fs, 11 mJ…
Synchrotron light sources and X-ray free-electron laser (FEL) facilities are unique tools providing extremely brilliant X-rays that allow the observation of matter with atomic spatial resolution. On the one hand, synchrotron light sources…
The possibility to obtain a three-dimensional representation of a single object with sub-$\mu$m resolution is crucial in many fields, from material science to clinical diagnostics. This is typically achieved through tomography, which…
We present some results from an archival VLA study of ultraluminous X-ray source s (ULXs). These unresolved non-nuclear X-ray sources have luminosities (L_X >= 1 0^39 ergs/sec) which may require somewhat exotic explanations, such as…
Recent progress in laser-based high-repetition rate extreme ultraviolet (EUV) lightsources and multidimensional photoelectron spectroscopy enable the build-up of a new generation of time-resolved photoemission experiments. Here, we present…
Laser wakefield accelerators have emerged as a promising candidate for compact synchrotron radiation and even x-ray free electron lasers. Today, to make the electrons emit electromagnetic radiation, the trajectories of laser wakefield…
The capability of Free-Electron Lasers to generate photon beams with record performances in the domain of MeV-class photon energy for nuclear photonics applications is here analyzed. We discuss possible nuclear FEL working points. Some…
High harmonic generation (HHG) enables extreme ultraviolet radiation with table-top setups. Its exceptional properties, such as coherence and (sub)-femtosecond pulse durations, have led to a diversity of applications. Some of these require…
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading lithography technique in semiconductor manufacturing due to its…