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As the feature size of integrated circuits continues to decrease, optical proximity correction (OPC) has emerged as a crucial resolution enhancement technology for ensuring high printability in the lithography process. Recently, level…

Image and Video Processing · Electrical Eng. & Systems 2023-11-01 Xing-Yu Ma , Shaogang Hao

As feature sizes shrink to the nanometer scale, accurately transferring circuit patterns from photomasks to silicon wafers becomes increasingly challenging. Optical proximity correction (OPC) is widely used to ensure pattern fidelity and…

Computer Vision and Pattern Recognition · Computer Science 2026-05-14 Yuting Hu , Lei Zhuang , Chen Wang , Ruiyang Qin , Hua Xiang , Gi-joon Nam , Jinjun Xiong

Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based OPC, termed as inverse lithography technology (ILT), has…

Artificial Intelligence · Computer Science 2024-09-02 Guojin Chen , Haoyu Yang , Haoxing Ren , Bei Yu , David Z. Pan

Lithography, transferring chip design masks to the silicon wafer, is the most important phase in modern semiconductor manufacturing flow. Due to the limitations of lithography systems, Extensive design optimizations are required to tackle…

Machine Learning · Computer Science 2024-05-07 Haoyu Yang , Haoxing Ren

With the feature size continuously shrinking in advanced technology nodes, mask optimization is increasingly crucial in the conventional design flow, accompanied by an explosive growth in prohibitive computational overhead in optical…

Computer Vision and Pattern Recognition · Computer Science 2023-03-23 Guojin Chen , Ziyang Yu , Hongduo Liu , Yuzhe Ma , Bei Yu

Continuous scaling of the VLSI system leaves a great challenge on manufacturing and optical proximity correction (OPC) is widely applied in conventional design flow for manufacturability optimization. Traditional techniques conducted OPC by…

Hardware Architecture · Computer Science 2020-11-17 Guojin Chen , Wanli Chen , Yuzhe Ma , Haoyu Yang , Bei Yu

Low-resolution image segmentation is crucial in real-world applications such as robotics, augmented reality, and large-scale scene understanding, where high-resolution data is often unavailable due to computational constraints. To address…

Computer Vision and Pattern Recognition · Computer Science 2025-05-09 Anzhe Cheng , Chenzhong Yin , Yu Chang , Heng Ping , Shixuan Li , Shahin Nazarian , Paul Bogdan

Optical proximity correction (OPC) is a widely-used resolution enhancement technique (RET) for printability optimization. Recently, rigorous numerical optimization and fast machine learning are the research focus of OPC in both academia and…

Computer Vision and Pattern Recognition · Computer Science 2023-03-23 Wenqian Zhao , Xufeng Yao , Ziyang Yu , Guojin Chen , Yuzhe Ma , Bei Yu , Martin D. F. Wong

Optical approaches have made great strides towards the goal of high-speed, energy-efficient computing necessary for modern deep learning and AI applications. Read-in and read-out of data, however, limit the overall performance of existing…

Emerging Technologies · Computer Science 2024-02-06 Alexander Song , Sai Nikhilesh Murty Kottapalli , Rahul Goyal , Bernhard Schölkopf , Peer Fischer

VLSI mask optimization is one of the most critical stages in manufacturability aware design, which is costly due to the complicated mask optimization and lithography simulation. Recent researches have shown prominent advantages of machine…

Machine Learning · Computer Science 2019-12-17 Haoyu Yang , Wei Zhong , Yuzhe Ma , Hao Geng , Ran Chen , Wanli Chen , Bei Yu

Inverse Lithography Technology (ILT) has emerged as a promising solution for photo mask design and optimization. Relying on multi-beam mask writers, ILT enables the creation of free-form curvilinear mask shapes that enhance printed wafer…

Computer Vision and Pattern Recognition · Computer Science 2024-11-13 Haoyu Yang , Haoxing Ren

Detecting subtle defects in window frames, including dents and scratches, is vital for upholding product integrity and sustaining a positive brand perception. Conventional machine vision systems often struggle to identify these defects in…

Image and Video Processing · Electrical Eng. & Systems 2023-09-14 Jorge Vasquez , Hemant K. Sharma , Tomotake Furuhata , Kenji Shimada

Recent approaches have shown that large-scale vision-language models such as CLIP can improve semantic segmentation performance. These methods typically aim for pixel-level vision-language alignment, but often rely on low resolution image…

Computer Vision and Pattern Recognition · Computer Science 2024-08-01 Anurag Das , Xinting Hu , Li Jiang , Bernt Schiele

Tabular data forms the backbone of high-stakes decision systems in finance, healthcare, and beyond. Yet industrial tabular datasets are inherently difficult: high-dimensional, riddled with missing entries, and rarely labeled at scale. While…

Machine Learning · Computer Science 2026-05-13 Bo Zheng , Yudong Chen , Zihua Xiong , Shuai Fang , Peidong He , Yang Yang , Sheng Guo

Deep learning has achieved great success in recent years with the aid of advanced neural network structures and large-scale human-annotated datasets. However, it is often costly and difficult to accurately and efficiently annotate…

Computer Vision and Pattern Recognition · Computer Science 2023-03-23 Chen Feng , Ioannis Patras

Open-vocabulary image segmentation has been advanced through the synergy between mask generators and vision-language models like Contrastive Language-Image Pre-training (CLIP). Previous approaches focus on generating masks while aligning…

Computer Vision and Pattern Recognition · Computer Science 2025-03-13 Quan-Sheng Zeng , Yunheng Li , Daquan Zhou , Guanbin Li , Qibin Hou , Ming-Ming Cheng

Project ILATO focuses on Improving Limited Angle computed Tomography by Optical data integration in order to enhance image quality and shorten acquisition times in X-ray based industrial quality inspection. Limited angle computed tomography…

Computational Geometry · Computer Science 2014-04-29 Andreas Beyer , Hubert Mara , Susanne Krömker

Dense pixel-specific representation learning at scale has been bottlenecked due to the unavailability of large-scale multi-view datasets. Current methods for building effective pretraining datasets heavily rely on annotated 3D meshes, point…

Computer Vision and Pattern Recognition · Computer Science 2024-05-17 Kalyani Marathe , Mahtab Bigverdi , Nishat Khan , Tuhin Kundu , Patrick Howe , Sharan Ranjit S , Anand Bhattad , Aniruddha Kembhavi , Linda G. Shapiro , Ranjay Krishna

Recently, pre-trained vision-language models have been increasingly used to tackle the challenging zero-shot segmentation task. Typical solutions follow the paradigm of first generating mask proposals and then adopting CLIP to classify…

Computer Vision and Pattern Recognition · Computer Science 2023-10-03 Siyu Jiao , Yunchao Wei , Yaowei Wang , Yao Zhao , Humphrey Shi

Vision-language foundation models such as CLIP have achieved tremendous results in global vision-language alignment, but still show some limitations in creating representations for specific image regions. % To address this problem, we…

Computer Vision and Pattern Recognition · Computer Science 2026-02-16 Walid Bousselham , Sofian Chaybouti , Christian Rupprecht , Vittorio Ferrari , Hilde Kuehne
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