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We have developed a combined photolithography and electron-beam lithography fabrication process for sub-\mum to \mum-size Nb/Al-AlOx/Nb Josephson junctions. In order to define the junction size and protect its top electrode during anodic…

Superconductivity · Physics 2011-02-14 Christoph Kaiser , J. M. Meckbach , K. Ilin , J. Lisenfeld , R. Schäfer , A. V. Ustinov , M. Siegel

A minimal method to fabricate Al/AlO$_x$/Al Josephson junctions (JJs) using photolithography and argon etching, before metallization and oxidation, is demonstrated. JJs with areas ranging from 1 to 6 $\mu$m$^2$ can be fabricated and, with…

Quantum Physics · Physics 2026-04-30 Imran Mahboob , Satoshi Sasaki , Takaaki Takenaka

Improvements in circuit design and more recently in materials and surface cleaning have contributed to a rapid development of coherent superconducting qubits. However, organic resists commonly used for shadow evaporation of Josephson…

Establishment of phase-coherence and a non-dissipative (super)current between two weakly coupled superconductors, known as the Josephson effect, plays a foundational role in basic physics and applications to metrology, precision sensing,…

Fabrication of sub-micron Josephson junctions is demonstrated using standard processing techniques for high-coherence, superconducting qubits. These junctions are made in two separate lithography steps with normal-angle evaporation. Most…

Superconductivity · Physics 2017-08-02 X. Wu , J. L. Long , H. S. Ku , R. E. Lake , M. Bal , D. P. Pappas

Josephson junctions are the principal circuit element in numerous superconducting quantum information devices and can be readily integrated into large-scale electronics. However, device integration at the wafer scale necessarily depends on…

For high-performance superconducting quantum devices based on Josephson junctions (JJs) decreasing lateral sizes is of great importance. Fabrication of sub-\mu m JJs is challenging due to non-flat surfaces with step heights of up to several…

Superconductivity · Physics 2013-03-28 J. M. Meckbach , M. Merker , S. J. Buehler , K. Ilin , B. Neumeier , U. Kienzle , E. Goldobin , R. Kleiner , D. Koelle , M. Siegel

Ion beam damage combined with nanoscale focused ion beam direct milling was used to create manufacturable SNS type Josephson junctions in 100 nm thick MgB$_{2}$ with T$_{C}$ of 38 K. The junctions show non-hysteretic current - voltage…

Superconductivity · Physics 2018-07-04 D. -J. Kang , N. H. Peng , R. Webb , C. Jeynes , J. H. Yun , S. H. Moon , D. Oh , G. Burnell , E. J. Tarte , D. F. Moore , M. G. Blamire

We make stacks of intrinsic Josephson junctions (IJJs) imbedded in the bulk of very thin ($d\leq 100$~nm) $\mathrm{Bi_2Sr_2CaCu_2O_{8+x}}$ single crystals. By precisely controlling the etching depth during the double-sided fabrication…

Superconductivity · Physics 2009-11-11 L. X. You , M. Torstensson , A. Yurgens , D. Winkler , C. T. Lin , B. Liang

Josephson junction spectroscopy is a powerful local microwave spectroscopy technique that has promising potential as a diagnostic tool to probe the microscopic origins of noise in superconducting qubits. We present advancements toward…

We report our progress in the high-temperature superconductor (HTS) Josephson junction fabrication process founded on using a focused helium ion beam damaging technique and discuss the expected device performance attainable with the HTS…

Hybrid devices comprised of topological insulator (TI) nanostructures in proximity to s-wave superconductors (SC) are expected to pave the way towards topological quantum computation. Fabrication under ultra-high vacuum conditions is…

The minimal length of ``one-dimensional'' Josephson junctions, in which the specific bound states of the magnetic flux retain their stability is discussed numerically. Thereby, we consider as ``long'' every Josephson junction, in which…

Superconductivity · Physics 2025-10-20 T. L. Boyadjiev , M. D. Todorov

Multiterminal Josephson junctions (MTJJs), devices in which a normal metal is in contact with three or more superconducting leads, have been proposed as artificial analogs of topological crystals. The topological nature of MTJJs manifests…

Mesoscale and Nanoscale Physics · Physics 2024-12-17 Maxwell Wisne , Yanpei Deng , Markus Lilja , Pertti Hakonen , Venkat Chandrasekhar

We have developed a fabrication technology for the development of large-scale superconducting integrated circuits with Nb-based Josephson junctions. The standard fabrication process with 10 mask levels uses four metal layers including 3 Nb…

Superconductivity · Physics 2021-07-30 Liliang Ying , Xue Zhang , Minghui Niu , Jie Ren , Wei Peng , Masaaki Meazawa , Zhen Wang

The combination of an ordinary s-type superconductor with three-dimensional topological insulators creates a promising platform for fault-tolerant topological quantum computing circuits based on Majorana braiding. The backbone of the…

Mesoscale and Nanoscale Physics · Physics 2024-10-28 Gerrit Behner , Abdur Rehman Jalil , Alina Rupp , Hans Lüth , Detlev Grützmacher , Thomas Schäpers

Josephson junctions with three or more superconducting leads have been predicted to exhibit topological effects in the presence of few conducting modes within the interstitial normal material. Such behavior, of relevance for…

Mesoscale and Nanoscale Physics · Physics 2020-02-25 Gino V. Graziano , Joon Sue Lee , Mihir Pendharkar , Chris Palmstrøm , Vlad S. Pribiag

Operation of a Superconducting Quantum Interference Device (SQUID) made of stacked Josephson junctions is analyzed numerically for a variety of junction parameters. Due to a magnetic coupling of junctions in the stack, such a SQUID has…

Superconductivity · Physics 2009-11-07 V. M. Krasnov

Reproducible high-Tc Josephson junctions have been made in a rather simple two-step process using ion irradiation. A microbridge (1 to 5 ?m wide) is firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7-? film through a gold mask…

Superconductivity · Physics 2009-11-11 N. Bergeal , X. Grison , J. Lesueur , G. Faini , M. Aprili , J. P. Contour

The Josephson effect is a hallmark signature of the superconducting state, which, however, has been sparsely explored in non-crystalline superconducting materials. Motivated by this, we consider a Josephson junction consisting of two…

Superconductivity · Physics 2024-09-04 Morten Amundsen , Vladimir Juričić , Jabir Ali Ouassou
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