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Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of…

Grazing Incidence X-ray Diffraction (GIXD) is a surface sensitive X-ray investigation technique (or geometry configuration) that can reveal the structural properties of a film deposited on a flat substrate. The term grazing indicates that…

Soft Condensed Matter · Physics 2015-12-29 Samuele Lilliu , Thomas Dane

Here we propose to exploit the low energy bandwidth, small wavelength and penetration power of ultrashort pulses from XFELs for resonant Small Angle Scattering (SAXS) on plasma structures in laser excited plasmas. Small angle scattering…

Plasma Physics · Physics 2016-03-09 Thomas Kluge , M. Bussmann , H. -K. Chung , C. Gutt , L. G. Huang , M. Zacharias , U. Schramm , T. E. Cowan

GISAXS is often used as a versatile tool for the contactless and destruction-free investigation of nanostructured surfaces. However, due to the shallow incidence angles, the footprint of the X-ray beam is significantly elongated, limiting…

Mesoscale and Nanoscale Physics · Physics 2017-06-20 Mika Pflüger , Victor Soltwisch , Jürgen Probst , Frank Scholze , Michael Krumrey

Grazing-Incidence X-ray fluorescence (GIXRF) analysis, which is closely related to total-reflection XRF, is a very powerful technique for the in-depth analysis of many types of technologically relevant samples, e.g. nanoparticle…

Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-angle X-ray scattering (GISAXS) is being considered because…

Resonant inelastic X-ray scattering (RIXS) is a powerful photon-in, photon-out spectroscopy technique for probing electronic, magnetic, and lattice excitations in matter. Time-resolved RIXS extends this capability through a stroboscopic…

Grazing incidence fast atom diffraction (GIFAD, or FAD) has developed as a surface sensitive technique. GIFAD is less sensitive to thermal decoherence but more demanding in terms of surface coherence, the mean distance between defects. Such…

Atomic Physics · Physics 2016-09-21 Maxime Debiossac , Philippe Roncin

We developed a setup using a two dimensional camera for Grazing Incidence x-ray Diffraction (GIXD) on Langmuir monolayers and more generally for surface diffraction on two dimensional powders. Compared to the classical setup using a linear…

Soft Condensed Matter · Physics 2009-11-10 Philippe Fontaine , Michel Goldmann Michel Bordessoule , Alain Jucha

We have developed an experimental system to simultaneously observe surface structure, morphology, composition, chemical state, and chemical activity for samples in gas phase environments. This is accomplished by simultaneously measuring…

Instrumentation and Detectors · Physics 2021-04-21 H. Kersell , P. Chen , H. Martins , Q. Lu , F. Brausse , B. -H. Liu , M. Blum , S. Roy , B. Rude , A. Kilcoyne , H. Bluhm , S. Nemšák

For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which…

Grazing incidence X-ray diffraction (GIXD) is widely used for the structural characterization of thin films, particularly for analyzing phase composition and the orientation distribution of crystallites. While various tools exist for…

Grazing-incidence X-ray diffraction (GIXRD) is a scattering technique which allows one to characterize the structure of fluid interfaces down to the molecular scale, including the measurement of the surface tension and of the interface…

Soft Condensed Matter · Physics 2024-04-10 Felix Höfling , Siegfried Dietrich

The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a…

Following the recent demonstration of grazing-incidence X-ray fluorescence (GIXRF) based characterization of the 3D atomic distribution of different elements and dimensional parameters of periodic nanoscale structures, this work presents a…

We demonstrate a technique that allows highly surface sensitive imaging of nanostructures on planar surfaces over large areas, providing a new avenue for research in materials science, especially for \textit{in situ} applications. The…

Understanding the processes of perovskite crystallization is essential for improving the properties of organic solar cells. In situ real-time grazing-incidence X-ray diffraction (GIXD) is a key technique for this task, but it produces large…

Detailed quantitative measurement of surface dynamics during thin film growth is a major experimental challenge. Here X-ray Photon Correlation Spectroscopy with coherent hard X-rays is used in a Grazing-Incidence Small-Angle X-ray…

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