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Nano-fabrication in silicon, arguably the most important material for modern technology, has been limited exclusively to its surface. Existing lithographic methods cannot penetrate the wafer surface without altering it, whereas emerging…
Silicon is an excellent material for microelectronics and integrated photonics with untapped potential for mid-IR optics. Despite broad recognition of the importance of the third dimension, current lithography methods do not allow…
High-transmissivity all-dielectric metasurfaces have recently attracted attention towards the realization of ultra-compact optical devices and systems. Silicon based metasurfaces, in particular, are highly promising considering the…
It has recently been shown that silicon nanophotonic waveguides can be used to construct all of the components of a photonic data transmission system on a single chip. These components can be integrated together with CMOS electronics to…
In this paper, we demonstrate the integration of photonic devices on sapphire substrates using multi-layer depressed cladding waveguides at both 780 nm and 1550 nm. The devices are up to 10-cm long and written at depths down to 400 um. The…
Over the past years, photonic metasurfaces have demonstrated their remarkable and diverse capabilities for achieving advanced control over light propagation by confining electromagnetic radiation within the deeply subwavelength thickness of…
Metasurfaces are two-dimensional optical structures enabling complete control of the amplitude, phase, and polarization of light. Unlike plasmonic metasurfaces, planar silicon structures facilitate high transmission, low losses and…
Laser cutting of semiconductor wafers and transparent dielectrics has become a dominant process in manufacturing industries, encompassing a wide range of applications from flat display panels to microelectronic chips. Limited by the…
The emerging applications of silicon photonics in free space, such as LiDARs and quantum photonics, urge versatile emission shaping beyond the capabilities of conventional grating couplers. A platform that offers arbitrary shaping of…
Photonic resonators allowing to confine the electromagnetic field in ultra-small volumes and with long decay times are crucial to a number of applications requiring enhanced nonlinear effects. For applications to integrated photonic devices…
We present here our recent progress in the three-dimensional (3D) direct laser writing (DLW) of step-index core waveguides inside diverse technologically relevant dielectric substrates, with specific emphasis on the demonstration of DLW…
Optical nanofibers confine light to subwavelength scales, and are of interest for the design, integration, and interconnection of nanophotonic devices. Here we demonstrate high transmission (> 97%) of the first family of excited modes…
A major difficulty in applying computational design methods to nanophotonic devices is ensuring that the resulting designs are fabricable. Here, we describe a general inverse design algorithm for nanophotonic devices that directly…
The spatially precise integration of arrays of micro-patterned two-dimensional (2D) crystals onto three-dimensionally structured Si/SiO$_2$ substrates represents an attractive strategy towards the low-cost system-on-chip integration of…
The demand for advanced photonics technology is increasing rapidly, fueled by the necessity for high-performance and cost-effective optical information processing systems extending into the quantum domain. Silicon, benefiting from its…
Multilayer metasurfaces provide substantially greater spectral design freedom than single-layer devices, yet their implementation in the visible and near-infrared remains limited by the complexity, cost, and low throughput of conventional…
Metasurfaces with local phase tuning by subwavelength elements promise unprecedented possibilities for ultra-thin and multifunctional optical devices, in which geometric phase design is widely used due to its resonant-free and large…
Metasurface holography, the reconstruction of holographic images by modulating the spatial amplitude and phase of light using metasurfaces, has emerged as a next-generation display technology. However, conventional fabrication techniques…
We propose and experimentally demonstrate a photonic routing architecture that can efficiently utilize the space of multi-plane (3D) photonic integration. A wafer with three planes of amorphous silicon waveguides was fabricated and…
We designed and simulated freestanding dielectric optical metasurfaces based on arrays of etched nanoholes in a silicon membrane. We showed $2\pi$ phase control and high forward transmission at mid-infrared wavelengths by tuning the…