English
Related papers

Related papers: 2D PZT MEMS Resonant Scanner Using a Three-Mask Pr…

200 papers

Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Due to its high frequency and large angle,…

Applied Physics · Physics 2024-01-02 Weimin Wang

3D printing allows rapid fabrication of complex objects from digital designs. One 3D-printing process, direct laser writing, polymerises a light-sensitive material by steering a focused laser beam through the shape of the object to be…

Two-dimensional, resonant scanners have been utilized in a large variety of imaging modules due to their compact form, low power consumption, large angular range, and high speed. However, resonant scanners have problems with non-optimal and…

Image and Video Processing · Electrical Eng. & Systems 2023-05-05 Zhanghao Sun , Ronald Quan , Olav Solgaard

The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan…

Applied Physics · Physics 2022-06-15 Paul Janin , Deepak Uttamchandani , Ralf Bauer

In order to develop an electro-optic waveguide, Pb(Zr, Ti)O3 ceramic ferroelectric thin films were elaborated by a modified sol-gel process on glass substrate. In the aim to study the optical properties of the PZT films, an accurate…

Materials Science · Physics 2014-05-26 Julien Cardin , Dominique Leduc , Thomas Schneider , Cyril Lupi , Dominique Averty , Hartmut Gundel

A multi-level tunable reflection array wide-angle beam scanning method is proposed to address the limited bandwidth and small scanning angle issues of current terahertz beam scanning technology. In this method, a focusing lens and its array…

Optics · Physics 2024-09-09 Weihua Yu , Hong Peng , Mingze Li , Haolin Li , Yuan Xue , Huikai Xie

Tunable focusing is a desired property in a wide range of optical imaging and sensing technologies but has tended to require bulky components which cannot be integrated on-chip and have slow actuation speeds. Recently, integration of…

Optical memristors represent a monumental leap in the fusion of photonics and electronics, heralding a new era of applications from neuromorphic computing to artificial intelligence. However, current technologies are hindered by complex…

We have studied the processing of piezoelectric thick films using electrophoretic deposition (EPD) for high-frequency ultrasound applications. Lead-zirconium-titanate (PZT) particles synthetized by solid states synthesis were dispersed in…

This article presents the design and assembly of a novel magnetically actuated endoscopic laser scanner device. The device is designed to perform 2D position control and high speed scanning of a fiber-based laser for operation in narrow…

Robotics · Computer Science 2017-11-22 Alperen Acemoglu , Nikhil Deshpande , Leonardo S. Mattos

Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of…

Scanning micro-mirror actuators are silicon-based oscillatory micro-electro-mechanical systems (MEMS). They enable laser distance measurements for automotive LIDAR applications as well as projection modules for the consumer market. For MEMS…

Mesoscale and Nanoscale Physics · Physics 2019-03-21 Ulrike Nabholz , Frank Schatz , Jan E. Mehner , Peter Degenfeld-Schonburg

Exceptional pulse contrast can be critical for ultraintense laser experiments, particularly when using solid density targets, and their use is becoming widespread. However, current plasma mirror technology is becoming inadequate for the new…

The optical properties of lead zirconate titanate (PZT) thin films deposited on ZnO were studied by m-lines spectroscopy. In order to retrieve the refractive index and the thickness of both layers from the m-lines spectra, we develop a…

Materials Science · Physics 2015-10-26 T Schneider , D Leduc , J. Cardin , C Lupi , N Barreau , H Gundel

Magnetic Resonance Force Microscopy (MRFM) enables three-dimensional imaging of nuclear spin densities in nanoscale objects. Based on numerical simulations, we evaluate the performance of strained SiN resonators as force sensors and show…

Applied Physics · Physics 2026-04-15 Nils Prumbaum , Christian L. Degen , Alexander Eichler

The work describes the capabilities of Laser Scanning Microscopy (LSM) as a spatially resolved method of testing high_Tc materials and devices. The earlier results obtained by the authors are briefly reviewed. Some novel applications of the…

Ferroelectric materials exhibit interesting electric, mechanical and optical properties. Particularly,tin-film lead zirconium titanate (PZT) has been used as a standard piezo-electric material in micro-electro-mechanical systems.…

Materials Science · Physics 2023-05-23 Suraj , Shankar Kumar Selvaraja

This paper demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror,…

Systems and Control · Electrical Eng. & Systems 2021-04-14 Han Woong Yoo , Rene Riegler , David Brunner , Stephan Albert , Thomas Thurner , Georg Schitter

High performance lead zirconate titanate (PZT) ceramics with aligned porosity for sensing applications were fabricated by an ice-templating method. To demonstrate the enhanced properties of these materials and their potential for sensor and…

Applied Physics · Physics 2019-02-04 Yan Zhang , James Roscow , Mengying Xie , Chris Bowen

Spaced-based mirrors are a developing use-case for Additive Manufacturing (AM), the process that builds a part layer-by-layer. The increased geometric freedom results in novel and advantageous designs previously unachievable.…

‹ Prev 1 2 3 10 Next ›