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We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the…

A study of damages caused by gallium focused ion beam (FIB) into III-V compounds is presented. Potential damages caused by local heating, ion implantation, and selective sputtering are presented. Preliminary analysis shows that local…

Similar to microspheres, thin-walled microbubble resonators support whispering gallery modes (WGMs) that combine ultrahigh Q-factors and small effective mode volumes. In contrast, their hollow nature enables enhanced interactions with…

The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor…

Focused ion beams (FIBs) are widely used to modify optoelectronic devices, but their utility is severely restricted in some III-V materials due to adverse effects such as nanofibre growth and contamination. This study describes an effective…

Applied Physics · Physics 2019-06-17 Pierce Maguire , Darragh Keane , Brian Kelly , Colm C. Faulkner , Hongzhou Zhang

Microstructural properties of thin-film absorber layers play a vital role in developing high-performance solar cells. Scanning probe microscopy is frequently used for measuring spatially inhomogeneous properties of thin-film solar cells.…

Focused ion beams (FIBs) are widely used in nanofabrication for applications such as circuit repair, ultra-thin lamella preparation, strain engineering, and quantum device prototyping. Although the lateral spread of the ion beam is often…

Instrumentation and Detectors · Physics 2025-11-04 M. G. Masteghin , Z. P. Aslam , A. P. Brown , M. J. Whiting , S. K. Clowes , R. P. Webb , D. C. Cox

Focused ion beam (FIB) has been used as an effective tool for precise nanoscale fabrication. It has recently been employed to tailor defect engineering in functional nanomaterials such as two-dimensional transition metal dichalcogenides…

Wavelength-sized microdisk resonators were fabricated on a single crystalline 4H-silicon-carbide-oninsulator platform (4H-SiCOI). By carrying out microphotoluminescence measurements at room temperature, we show that the microdisk resonators…

This study presents a detailed examination of the lattice distortions introduced by glancing incidence Focussed Ion Beam (FIB) milling. Using non-destructive multi-reflection Bragg coherent X-ray diffraction we probe damage formation in an…

Materials Science · Physics 2017-11-29 Felix Hofmann , Ross J. Harder , Wenjun Liu , Yuzi Liu , Ian K Robinson , Yevhen Zayachuk

The Nitrogen Vacancy color center (NV-) in diamond is of great interest for novel photonic applications. Diamond nano-photonic structures are often implemented using Focused-Ion-Beam (FIB) processing, leaving a damaged surface which has a…

Optically pumped InAs quantum dot microdisk lasers with grooves etched on their surface by a focused ion beam is studied. It is shown that the radial grooves, depending on their length, suppress the lasing of specific radial modes of the…

We demonstrate spatial modification of the optical properties of thin-film metal oxides, zinc oxide and vanadium dioxide as representatives, using a commercial focused ion beam (FIB) system. Using a Ga+ FIB and thermal annealing, we…

Fabry-Perot cavities are essential tools for applications like precision metrology, optomechanics and quantum technologies. A major challenge is the creation of microscopic spherical mirror structures which allow the precise matching with…

The focused ion beam (FIB) microscope is well established as a high-resolution machining instrument capable of site-selectively removing material down to the nanoscale. Beyond subtractive processing, however, the FIB can also add material…

Materials Science · Physics 2025-10-07 Frances Isabel Allen

Optical microresonators have proven powerful in a wide range of applications, including cavity quantum electrodynamics, biosensing, microfludics, and cavity optomechanics. Their performance depends critically on the exact distribution of…

We demonstrate direct focused ion beam (FIB) writing as an enabling technology for realizing spin-wave-optics devices. It is shown that ion-beam irradiation changes the characteristics of YIG films on a submicron scale in a highly…

We present the first observation of optomechanical coupling in ultra-high Q crystalline whispering-gallery-mode (WGM) resonators. The high purity of the crystalline material enables optical quality factors in excess of 10^{10} and finesse…

Optics · Physics 2015-05-14 J. Hofer , A. Schliesser , T. J. Kippenberg

We demonstrate integrating a high quality factor lithium niobate microdisk resonator with a free-standing membrane waveguide. Our technique is based on femtosecond laser direct writing which produces the pre-structure, followed by focused…

Optics · Physics 2017-01-20 Zhiwei Fang , Yingxin Xu , Min Wang , Lingling Qiao , Jintian Lin , Wei Fang , Ya Cheng

Focussed Ion Beam (FIB) milling is a mainstay of nano-scale machining. By manipulating a tightly focussed beam of energetic ions, often gallium (Ga+), FIB can sculpt nanostructures via localised sputtering. This ability to cut solid matter…

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