Roadmap for focused ion beam technologies
Abstract
The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was originally intended for photomask repair in the semiconductor industry, there are now many different types of FIB that are commercially available. These instruments use a range of ion species and are applied broadly in materials science, physics, chemistry, biology, medicine, and even archaeology. The goal of this roadmap is to provide an overview of FIB instrumentation, theory, techniques and applications. By viewing FIB developments through the lens of the various research communities, we aim to identify future pathways for ion source and instrumentation development as well as emerging applications, and the scope for improved understanding of the complex interplay of ion-solid interactions. We intend to provide a guide for all scientists in the field that identifies common research interests and will support future fruitful interactions connecting tool development, experiment and theory. While a comprehensive overview of the field is sought, it is not possible to cover all research related to FIB technologies in detail. We give examples of specific projects within the broader context, referencing original works and previous review articles throughout.
Keywords
Cite
@article{arxiv.2305.19631,
title = {Roadmap for focused ion beam technologies},
author = {Katja Höflich and Gerhard Hobler and Frances I. Allen and Tom Wirtz and Gemma Rius and Lisa McElwee-White and Arkady V. Krasheninnikov and Matthias Schmidt and Ivo Utke and Nico Klingner and Markus Osenberg and Rosa Córdoba and Flyura Djurabekova and Ingo Manke and Philip Moll and Mariachiara Manoccio and José Marıa De Teresa and Lothar Bischoff and Johann Michler and Olivier De Castro and Anne Delobbe and Peter Dunne and Oleksandr V. Dobrovolskiy and Natalie Frese and Armin Gölzhäuser and Paul Mazarov and Dieter Koelle and Wolfhard Möller and Francesc Pérez-Murano and Patrick Philipp and Florian Vollnhals and Gregor Hlawacek},
journal= {arXiv preprint arXiv:2305.19631},
year = {2023}
}
Comments
This publication is based upon work from the COST Action FIT4NANO CA19140, supported by COST (European Cooperation in Science and Technology) https://www.cost.eu/. Financial support from COST Action CA19140 is acknowledged http://www.fit4nano.eu/ Version 3 has many text and language edits as well as layout tuning but no substantial new content