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Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based OPC, termed as inverse lithography technology (ILT), has…

Artificial Intelligence · Computer Science 2024-09-02 Guojin Chen , Haoyu Yang , Haoxing Ren , Bei Yu , David Z. Pan

Recent decades have witnessed remarkable advancements in artificial intelligence (AI), including large language models (LLMs), image and video generative models, and embodied AI systems. These advancements have led to an explosive increase…

Machine Learning · Computer Science 2025-02-12 Zixiao Wang , Jieya Zhou , Su Zheng , Shuo Yin , Kaichao Liang , Shoubo Hu , Xiao Chen , Bei Yu

The end of the 19th century brought about a change in the dynamics of computing by the development of the microprocessor. Huge bedroom size computers began being replaced by portable, smaller sized desktops. Today the world is dominated by…

Other Computer Science · Computer Science 2015-02-25 Jatin Chopra

Optical imaging technologies are central to discovery in the life and physical sciences, yet their impact depends on how readily they can be built, adapted, and sustained across laboratories. Digital fabrication, including desktop 3D…

Accurate segmentation and measurement of lithography scanning electron microscope (SEM) images are crucial for ensuring precise process control, optimizing device performance, and advancing semiconductor manufacturing yield. Lithography…

Computer Vision and Pattern Recognition · Computer Science 2025-11-18 Xinyu He , Botong Zhao , Bingbing Li , Shujing Lyu , Jiwei Shen , Yue Lu

In the realm of lithography, Optical Proximity Correction (OPC) is a crucial resolution enhancement technique that optimizes the transmission function of photomasks on a pixel-based to effectively counter Optical Proximity Effects (OPE).…

Optics · Physics 2024-12-20 Ruixiang Chen , Yang Zhao , Haoqin Li , Rui Chen

With continuous progression of Moore's Law, integrated circuit (IC) device complexity is also increasing. Scanning Electron Microscope (SEM) image based extensive defect inspection and accurate metrology extraction are two main challenges…

Computer Vision and Pattern Recognition · Computer Science 2023-08-17 Vic De Ridder , Bappaditya Dey , Sandip Halder , Bartel Van Waeyenberge

Optical lithography is the main enabler to semiconductor manufacturing. It requires extensive processing to perform the Resolution Enhancement Techniques (RETs) required to transfer the design data to a working Integrated Circuits (ICs).…

Machine Learning · Computer Science 2024-04-09 Mohamed S. E. Habib , Hossam A. H. Fahmy , Mohamed F. Abu-ElYazeed

Differentiable optics, as an emerging paradigm that jointly optimizes optics and (optional) image processing algorithms, has made innovative optical designs possible across a broad range of applications. Many of these systems utilize…

As the feature size of integrated circuits continues to decrease, optical proximity correction (OPC) has emerged as a crucial resolution enhancement technology for ensuring high printability in the lithography process. Recently, level…

Image and Video Processing · Electrical Eng. & Systems 2023-11-01 Xing-Yu Ma , Shaogang Hao

Deep optics has emerged as a promising approach by co-designing optical elements with deep learning algorithms. However, current research typically overlooks the analysis and optimization of manufacturing and assembly tolerances. This…

Computer Vision and Pattern Recognition · Computer Science 2025-02-10 Jun Dai , Liqun Chen , Xinge Yang , Yuyao Hu , Jinwei Gu , Tianfan Xue

Future complementary metal oxide semiconductor (CMOS) scaling for advanced integrated circuit (IC) technologies may well depend on "More than Moore" (MtM) approaches using heterogeneous integration of semiconductor-based devices. In order…

Materials Science · Physics 2012-04-09 J. Stopford , A. Henry , D. Allen , N. Bennett , D. Manessis , L. Boettcher , J. Wittge , A. N. Danilewsky , P. J. McNally

The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern…

Optics · Physics 2016-08-10 Jingbo Sun , Tianboyu Xu , Natalia M. Litchinitser

Optical coherence tomography (OCT) is a prevalent, interferometric, high-resolution imaging method with broad biomedical applications. Nonetheless, OCT images suffer from an artifact, called speckle which degrades the image quality. Digital…

Lithography is fundamental to integrated circuit fabrication, necessitating large computation overhead. The advancement of machine learning (ML)-based lithography models alleviates the trade-offs between manufacturing process expense and…

Computer Vision and Pattern Recognition · Computer Science 2023-04-11 Guojin Chen , Zehua Pei , Haoyu Yang , Yuzhe Ma , Bei Yu , Martin D. F. Wong

Reflective ptychography is a promising lensless imaging technique with a wide field of view, offering significant potential for applications in semiconductor manufacturing and detection. However, many semiconductor materials are coated with…

Optics · Physics 2025-01-03 Yun Gao , Qijun You , Peixiang Lu , Wei Cao

Since the introduction of optical coherence tomography (OCT), it has been possible to study the complex 3D morphological changes of the optic nerve head (ONH) tissues that occur along with the progression of glaucoma. Although several deep…

From climate science to drug discovery, scientific computing demands have surged dramatically in recent years -- driven by larger datasets, more sophisticated models, and higher simulation fidelity. This growth rate far outpaces transistor…

We present a machine learning approach for efficiently computing order independent transparency (OIT). Our method is fast, requires a small constant amount of memory (depends only on the screen resolution and not on the number of triangles…

Graphics · Computer Science 2023-05-18 Grigoris Tsopouridis , Andreas-Alexandros Vasilakis , Ioannis Fudos

This study presents an open source method for detecting 3D printing anomalies by comparing images of printed layers from a stationary monocular camera with G-code-based reference images of an ideal process generated with Blender, a physics…

Computer Vision and Pattern Recognition · Computer Science 2021-11-05 Aliaksei Petsiuk , Joshua M. Pearce
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