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Digital watermarking has been widely studied for the protection of intellectual property. Traditional watermarking schemes often design in a "wider" rule, which applies one general embedding mechanism to all images. But this will limit the…
Moore's law has long served the semiconductor industry as the driving force for producing ever-advancing electronics technologies. However, given the economic implications and technological challenges associated with the present…
We introduce neural lithography to address the 'design-to-manufacturing' gap in computational optics. Computational optics with large design degrees of freedom enable advanced functionalities and performance beyond traditional optics.…
Multiple patterning lithography has been widely adopted in advanced technology nodes of VLSI manufacturing. As a key step in the design flow, multiple patterning layout decomposition (MPLD) is critical to design closure. Due to the…
Ptychography is a lensless imaging method that allows for wavefront sensing and phase-sensitive microscopy from a set of diffraction patterns. Recently, it has been shown that the optimization task in ptychography can be achieved via…
Medical imaging plays a vital role in modern diagnostics; however, interpreting high-resolution radiological data remains time-consuming and susceptible to variability among clinicians. Traditional image processing techniques often lack the…
Label-free tomographic microscopy offers a compelling means to visualize three-dimensional (3D) refractive index (RI) distributions from two-dimensional (2D) intensity measurements. However, limited forward-model accuracy and the ill-posed…
Lithography simulation is a critical step in VLSI design and optimization for manufacturability. Existing solutions for highly accurate lithography simulation with rigorous models are computationally expensive and slow, even when equipped…
As technology scaling is approaching the physical limit, lithography hotspot detection has become an essential task in design for manufacturability. While the deployment of pattern matching or machine learning in hotspot detection can help…
Inverse Lithography Technology (ILT) has emerged as a promising solution for photo mask design and optimization. Relying on multi-beam mask writers, ILT enables the creation of free-form curvilinear mask shapes that enhance printed wafer…
Lithography simulation is one of the key steps in physical verification, enabled by the substantial optical and resist models. A resist model bridges the aerial image simulation to printed patterns. While the effectiveness of learning-based…
Optical approaches have made great strides towards the goal of high-speed, energy-efficient computing necessary for modern deep learning and AI applications. Read-in and read-out of data, however, limit the overall performance of existing…
Semiconductor manufacturing generates vast amounts of image data, crucial for defect identification and yield optimization, yet often exceeds manual inspection capabilities. Traditional clustering techniques struggle with high-dimensional,…
The high-volume manufacturing of the next generation of semiconductor devices requires advances in measurement signal analysis. Many in the semiconductor manufacturing community have reservations about the adoption of deep learning; they…
Reliability has become an increasing concern in modern computing. Integrated circuits (ICs) are the backbone of modern computing devices across industries, including artificial intelligence (AI), consumer electronics, healthcare,…
Ptychography is an enabling coherent diffraction imaging technique for both fundamental and applied sciences. Its applications in optical microscopy, however, fall short for its low imaging throughput and limited resolution. Here, we report…
Ever brighter light sources, fast parallel detectors, and advances in phase retrieval methods, have made ptychography a practical and popular imaging technique. Compared to previous techniques, ptychography provides superior robustness and…
Medical imaging segmentation plays a significant role in the automatic recognition and analysis of lesions. State-of-the-art methods, particularly those utilizing transformers, have been prominently adopted in 3D semantic segmentation due…
Recent advances in photonic inverse design have demonstrated the ability to automatically synthesize compact, high-performance photonic components that surpass conventional, hand-designed structures, offering a promising path toward…
The rapid growth of artificial intelligence, coupled with the slowing of Moore's law, is straining computing infrastructure, as CMOS electronics face inherent limits in bandwidth, energy efficiency, and parallelism. Integrated photonic…