Related papers: A high-efficiency programmable modulator for extre…
Extreme ultraviolet (EUV) lithography is the cornerstone of the fabrication of advanced integrated circuits at the 7-nm node and beyond, but its reliance on multi-element reflective projection optics makes it inaccessible for small-scale…
Extreme ultraviolet (EUV) lithography is the leading lithography technique in CMOS mass production, moving towards the sub-10 nm half-pitch (HP) regime with the ongoing development of the next generation high-numerical aperture (high-NA)…
Ultraviolet (UV) electro-optic modulation system based on graphene-plasmonic metamaterials nanomechanical system (NEMS) with superlubricity is investigated. Due to the strong optical absorption intensity of graphene in the UV region and the…
We propose a novel concept for efficient dynamic tuning of optical properties of a high refractive index subwavelength nanoparticle with a magnetic Mie-type resonance by means of femtosecond laser radiation. This concept is based on…
Spatial light modulators enable arbitrary control of the intensity of optical light fields and facilitate a variety of applications in biology, astronomy and atomic, molecular and optical physics. For coherent light fields, holography,…
Controlled and precise fabrication of structures with heights in the range of single digit nanometres is one of the challenges for diffraction gratings operating near-normal incidence in the extreme ultraviolet (EUV) and soft X-ray range.…
Interfering deep ultraviolet (DUV) lasers can induce substantial density modulations in an ozone-doped gas flow via photochemical reactions, creating volume diffraction gratings. These transient optics are immune to target debris and…
We report a breakthrough in the search for versatile diffractive elements for cold neutrons. Nanoparticles are spatially arranged by holographical means in a photopolymer. These grating structures show remarkably efficient diffraction of…
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or…
Dielectrics' refractive index limits photonics miniaturization. By coupling light to metal's free electrons, plasmonic devices achieve deeper localization, which scales with the device geometric size. However, when localization approaches…
The present work demonstrates an electro-optic polymer based Mach-Zehnder (MZ) modulator fabricated utilizing advanced ultraviolet (UV) imprinting and aligned ink-jet printing technologies for patterning and layer deposition. The bottom…
This paper discusses a simple, low-cost, highly efficient two-mirror projector with a simplified illumination system. The EUV source power can be reduced by 1/10 compared to the current six-mirror EUV projector system. The required EUV…
Microscopy with extreme ultraviolet (EUV) radiation holds promise for high-resolution imaging with excellent material contrast, due to the short wavelength and numerous element-specific absorption edges available in this spectral range. At…
We demonstrate an x-ray beam splitter with high performances for multi-kilo-electron-volt photons. The device is based on diffraction on kinoform structures, which overcome the limitations of binary diffraction gratings. This beam splitter…
Emerging technology based on artificial materials containing metallic structures has raised the prospect for unprecedented control of terahertz waves through components like filters, absorbers and polarizers. The functionality of these…
A critical technology for high-volume manufacturing of nanoscale integrated circuits is a high-power extreme ultraviolet (EUV) light source. Over the past decades, laser-produced plasma (LPP) sources have been actively utilized in this…
On-chip ultraviolet sources are of great interest for building compact and scalable atomic clocks, quantum computers, and spectrometers; however, few material platforms are suitable for integrated ultraviolet light generation. Of these…
Electro-optic modulators for next-generation optical interconnects require low loss-efficiency products, compact footprints, high modulation efficiency, broad bandwidths, and low losses. Here we propose and demonstrate a low-loss…
Nanoparticle-polymer composite gratings incorporating ultrahigh-refractive-index hyperbranched polymers as organic nanoparticles have demonstrated exceptional light optical properties, yet their potential for neutron diffraction…
Lamellar gratings are widely used diffractive optical elements; gratings etched into Si can be used as structural elements or prototypes of structural elements in integrated electronic circuits. For the control of the lithographic…