UV imprinting and aligned ink-jet printing for multi-layer patterning of electro-optic polymer modulators
Abstract
The present work demonstrates an electro-optic polymer based Mach-Zehnder (MZ) modulator fabricated utilizing advanced ultraviolet (UV) imprinting and aligned ink-jet printing technologies for patterning and layer deposition. The bottom electrode layer is designed and directly ink-jet printed on the substrate to form the patterned layer. The waveguide structure is formed into a bottom cladding polymer using a transparent flexible mold based UV imprinting method. All other layers can be ink-jet printed. The top electrode is aligned and printed over the Mach-Zehnder arm. The modulator demonstrates a V-pi of 8V at 3kHz. This technology shows great potential in minimizing the fabrication complexity and roll-to-roll compatibility for manufacturing low cost, light-weight, and conformal modulators at high throughput.
Cite
@article{arxiv.1403.0139,
title = {UV imprinting and aligned ink-jet printing for multi-layer patterning of electro-optic polymer modulators},
author = {Xiaohui Lin and Tao Ling and Harish Subbaraman and Xingyu Zhang and Kwangsub Byun and L. Jay Guo and Ray T Chen},
journal= {arXiv preprint arXiv:1403.0139},
year = {2015}
}
Comments
3 pages, 4 figures