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We show that torsion resonators can experience massive dissipation dilution due to nanoscale strain, and draw a connection to a century-old theory from the torsion balance community which suggests that a simple torsion ribbon is naturally…

Mesoscale and Nanoscale Physics · Physics 2021-12-16 Jon R. Pratt , Aman R. Agrawal , Charles A. Condos , Christian M. Pluchar , Stephan Schlamminger , Dalziel J. Wilson

We report actuation and detection of gigahertz-range resonance frequencies in nano-crystalline diamond mechanical resonators. High order transverse vibration modes are measured in coupled-beam resonators exhibiting frequencies up to 1.441…

Mesoscale and Nanoscale Physics · Physics 2009-11-13 Alexei Gaidarzhy , Matthias Imboden , Pritiraj Mohanty , Janet Rankin , Brian W. Sheldon

The motion of a mechanical resonator is intrinsically decomposed over a collection of normal modes of vibration. When the resonator is used as a sensor, its multimode nature often deteriorates or limits its performance and sensitivity. This…

Applied Physics · Physics 2022-02-23 Giada La Gala , John P. Mathew , Pascal Neveu , Ewold Verhagen

We present nanofabrication and mechanical measurements of single-crystal diamond cantilevers with thickness down to 85 nm, thickness uniformity better than 20 nm, and lateral dimensions up to 240 um. Quality factors exceeding one million…

Mesoscale and Nanoscale Physics · Physics 2014-05-15 Y. Tao , J. M. Boss , B. A. Moores , C. L. Degen

Nanomechanical resonators (NMRs) offer a promising alternative to traditional thermal-based radiation detectors due to their immunity to electrical noise. In recent years, these sensors have reached the previously unattained theoretical…

Instrumentation and Detectors · Physics 2026-05-05 Mathis Turgeon-Roy , Mohammed Shakir , Zachary Louis-Seize , Raphael St-Gelais

Nanomechanical resonators are used as high performance detectors in a variety of applications such as mass spectrometry and atomic force microscopy. Initial emphasis in nanomechanical resonant sensor research was on increasing the…

Applied Physics · Physics 2021-02-03 Alper Demir

Advancing electromechanical resonators towards terahertz frequencies opens vast bandwidths for phononic signal processing. In quantum phononics, mechanical resonators at these frequencies can remain in their quantum ground state even at…

Applied Physics · Physics 2025-08-07 Jiacheng Xie , Weifeng Wu , Mohan Shen , Patrick Fay , Hong X. Tang

Nanomechanical resonators with increasingly high quality factors are enabled following recent insights into energy storage and loss mechanisms in nanoelectromechanical systems (NEMS). Consequently, efficient, non-dissipative transduction…

Mesoscale and Nanoscale Physics · Physics 2012-04-11 Thomas Faust , Peter Krenn , Stephan Manus , Jörg P. Kotthaus , Eva M. Weig

On-chip optical resonators have the promise of revolutionizing numerous fields including metrology and sensing; however, their optical losses have always lagged behind their larger discrete resonator counterparts based on crystalline…

Suspended aluminium nanoelectromechanical resonators have been fabricated, and the manufacturing process is described in this work. Device motion is driven and detected with a magnetomotive method. The resonance response has been measured…

Instrumentation and Detectors · Physics 2019-01-30 T. Kamppinen , V. B. Eltsov

We achieve high detectivity terahertz sensing using a silicon nitride nanomechanical resonator functionalized with a metasurface absorber. High performances are achieved by striking a fine balance between the frequency stability of the…

We demonstrate a new optomechanical device system which allows highly efficient transduction of femtogram nanobeam resonators. Doubly clamped nanomechanical resonators with mass as small as 25 fg are embedded in a high-finesse…

Optics · Physics 2012-06-20 Xiankai Sun , Jiangjun Zheng , Menno Poot , Chee Wei Wong , Hong X. Tang

The measurement of micron-sized mechanical resonators by electrical techniques is difficult, because of the combination of a high frequency and a small mechanical displacement which together suppress the electromechanical coupling. The only…

Mesoscale and Nanoscale Physics · Physics 2015-05-13 Mika A. Sillanpaa , Jayanta Sarkar , Jaakko Sulkko , Juha Muhonen , Pertti J. Hakonen

We study the microwave impedance of extremely high aspect ratio (length/width ~ 5,000) superconducting niobium nitride nanowires. The nanowires are fabricated in a compact meander geometry that is in series with the center conductor of a 50…

Superconductivity · Physics 2016-07-14 Daniel F. Santavicca , Jesse K. Adams , Lierd E. Grant , Adam N. McCaughan , Karl K. Berggren

Nanomechanical resonators, machined out of Silicon-on-Insulator wafers, are operated in the nonlinear regime to investigate higher-order mechanical mixing at radio frequencies, relevant to signal processing and nonlinear dynamics on…

Mesoscale and Nanoscale Physics · Physics 2009-10-31 A. Erbe , G. Corso , H. Krommer , A. Kraus , K. Richter , R. H. Blick

We initiate the development of a theory of the elasticity of nanoscale objects based upon new physical concepts which remain properly defined on the nanoscale. This theory provides a powerful way of understanding nanoscale elasticity in…

Materials Science · Physics 2016-08-31 D. E. Segall , Sohrab Ismail-Beigi , T. A. Arias

In this report, we present nanoelectromechanical resonators fabricated with thin exfoliated crystals of a high-T$_c$ cuprate superconductor Bi$_2$Sr$_2$Ca$_1$Cu$_2$O$_{8+\delta}$. The mechanical readout is performed by capacitively coupling…

Most mechanical resonators are treated as simple linear oscillators. Nonlinearity in the resonance behavior of nanoelectromechanical systems (NEMS) has only lately attracted significant interest. Most recently, cubic-order nonlinearity has…

Mesoscale and Nanoscale Physics · Physics 2017-03-10 Madhav Kumar , Bhaskar Choubey , Harish Bhaskaran

Recent advances in nanotechnology have led to the development of nano-electro-mechanical systems (NEMS) such as nanomechanical resonators, which have recently received significant attention from the scientific community. This has not only…

Mesoscale and Nanoscale Physics · Physics 2011-05-11 Kilho Eom , Harold S. Park , Dae Sung Yoon , Taeyun Kwon

Nanotechnology and the consequent emergence of miniaturized devices are driving the need to improve our understanding of the mechanical properties of a myriad of materials. Here we focus on amorphous polymeric materials and introduce a new…